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High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3

Olsson, Maryam LU ; Azens, Andres; Kullman, Lisen and Granqvist, Claes Göran (1997) In Thin Solid Films 295(1-2). p.117-121
Abstract
Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.
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author
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Molybdenum oxide, Optical properties, Sputtering
in
Thin Solid Films
volume
295
issue
1-2
pages
117 - 121
publisher
Elsevier
ISSN
0040-6090
DOI
10.1016/S0040-6090(96)09306-6
language
English
LU publication?
no
id
54ff70f5-07db-453c-898b-1ccb86eb36b1 (old id 4643592)
date added to LUP
2014-09-10 07:29:12
date last changed
2016-06-29 09:06:33
@article{54ff70f5-07db-453c-898b-1ccb86eb36b1,
  abstract     = {Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.},
  author       = {Olsson, Maryam and Azens, Andres and Kullman, Lisen and Granqvist, Claes Göran},
  issn         = {0040-6090},
  keyword      = {Molybdenum oxide,Optical properties,Sputtering},
  language     = {eng},
  number       = {1-2},
  pages        = {117--121},
  publisher    = {Elsevier},
  series       = {Thin Solid Films},
  title        = {High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3},
  url          = {http://dx.doi.org/10.1016/S0040-6090(96)09306-6},
  volume       = {295},
  year         = {1997},
}