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High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3

Olsson, Maryam LU ; Azens, Andres ; Kullman, Lisen and Granqvist, Claes Göran (1997) In Thin Solid Films 295(1-2). p.117-121
Abstract
Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.
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author
; ; and
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Molybdenum oxide, Optical properties, Sputtering
in
Thin Solid Films
volume
295
issue
1-2
pages
117 - 121
publisher
Elsevier
external identifiers
  • scopus:0031074320
ISSN
0040-6090
DOI
10.1016/S0040-6090(96)09306-6
language
English
LU publication?
no
id
54ff70f5-07db-453c-898b-1ccb86eb36b1 (old id 4643592)
date added to LUP
2016-04-01 16:52:58
date last changed
2022-01-28 22:50:19
@article{54ff70f5-07db-453c-898b-1ccb86eb36b1,
  abstract     = {{Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.}},
  author       = {{Olsson, Maryam and Azens, Andres and Kullman, Lisen and Granqvist, Claes Göran}},
  issn         = {{0040-6090}},
  keywords     = {{Molybdenum oxide; Optical properties; Sputtering}},
  language     = {{eng}},
  number       = {{1-2}},
  pages        = {{117--121}},
  publisher    = {{Elsevier}},
  series       = {{Thin Solid Films}},
  title        = {{High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3}},
  url          = {{http://dx.doi.org/10.1016/S0040-6090(96)09306-6}},
  doi          = {{10.1016/S0040-6090(96)09306-6}},
  volume       = {{295}},
  year         = {{1997}},
}