High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3
(1997) In Thin Solid Films 295(1-2). p.117-121- Abstract
- Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4643592
- author
- Olsson, Maryam LU ; Azens, Andres ; Kullman, Lisen and Granqvist, Claes Göran
- publishing date
- 1997
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Molybdenum oxide, Optical properties, Sputtering
- in
- Thin Solid Films
- volume
- 295
- issue
- 1-2
- pages
- 117 - 121
- publisher
- Elsevier
- external identifiers
-
- scopus:0031074320
- ISSN
- 0040-6090
- DOI
- 10.1016/S0040-6090(96)09306-6
- language
- English
- LU publication?
- no
- id
- 54ff70f5-07db-453c-898b-1ccb86eb36b1 (old id 4643592)
- date added to LUP
- 2016-04-01 16:52:58
- date last changed
- 2022-01-28 22:50:19
@article{54ff70f5-07db-453c-898b-1ccb86eb36b1, abstract = {{Mo oxide films with good electrochromic properties were produced by single-target and dual-target reactive d.c. magnetron sputtering. Dual-target deposition was shown capable of yielding optically functional films at a rate ∼ 20 times higher than that for single-target deposition, which is a result of considerable technical interest.}}, author = {{Olsson, Maryam and Azens, Andres and Kullman, Lisen and Granqvist, Claes Göran}}, issn = {{0040-6090}}, keywords = {{Molybdenum oxide; Optical properties; Sputtering}}, language = {{eng}}, number = {{1-2}}, pages = {{117--121}}, publisher = {{Elsevier}}, series = {{Thin Solid Films}}, title = {{High-rate dual-target dc magnetron sputter deposition of electromagnetic MoO3}}, url = {{http://dx.doi.org/10.1016/S0040-6090(96)09306-6}}, doi = {{10.1016/S0040-6090(96)09306-6}}, volume = {{295}}, year = {{1997}}, }