High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide
(1998) In Solar Energy Materials and Solar Cells 53(3-4). p.349-356- Abstract
- Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4643607
- author
- Olsson, Maryam LU ; Kullman, Lisen and Granqvist, Claes Göran
- publishing date
- 1998
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Thin films, Sputter deposition, Molybdenum oxide, Smart windows
- in
- Solar Energy Materials and Solar Cells
- volume
- 53
- issue
- 3-4
- pages
- 349 - 356
- publisher
- Elsevier
- external identifiers
-
- scopus:0032097159
- ISSN
- 0927-0248
- DOI
- 10.1016/S0927-0248(98)00033-6
- language
- English
- LU publication?
- no
- id
- 6129d86e-f850-4ed6-b492-f2b74dfd1081 (old id 4643607)
- date added to LUP
- 2016-04-01 17:04:13
- date last changed
- 2022-01-29 00:06:35
@article{6129d86e-f850-4ed6-b492-f2b74dfd1081, abstract = {{Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.}}, author = {{Olsson, Maryam and Kullman, Lisen and Granqvist, Claes Göran}}, issn = {{0927-0248}}, keywords = {{Thin films; Sputter deposition; Molybdenum oxide; Smart windows}}, language = {{eng}}, number = {{3-4}}, pages = {{349--356}}, publisher = {{Elsevier}}, series = {{Solar Energy Materials and Solar Cells}}, title = {{High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide}}, url = {{http://dx.doi.org/10.1016/S0927-0248(98)00033-6}}, doi = {{10.1016/S0927-0248(98)00033-6}}, volume = {{53}}, year = {{1998}}, }