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High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Olsson, Maryam LU ; Kullman, Lisen and Granqvist, Claes Göran (1998) In Solar Energy Materials and Solar Cells 53(3-4). p.349-356
Abstract
Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.
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author
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Thin films, Sputter deposition, Molybdenum oxide, Smart windows
in
Solar Energy Materials and Solar Cells
volume
53
issue
3-4
pages
349 - 356
publisher
Elsevier
ISSN
0927-0248
DOI
10.1016/S0927-0248(98)00033-6
language
English
LU publication?
no
id
6129d86e-f850-4ed6-b492-f2b74dfd1081 (old id 4643607)
date added to LUP
2014-09-10 07:33:40
date last changed
2016-06-29 09:18:42
@article{6129d86e-f850-4ed6-b492-f2b74dfd1081,
  abstract     = {Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.},
  author       = {Olsson, Maryam and Kullman, Lisen and Granqvist, Claes Göran},
  issn         = {0927-0248},
  keyword      = {Thin films,Sputter deposition,Molybdenum oxide,Smart windows},
  language     = {eng},
  number       = {3-4},
  pages        = {349--356},
  publisher    = {Elsevier},
  series       = {Solar Energy Materials and Solar Cells},
  title        = {High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide},
  url          = {http://dx.doi.org/10.1016/S0927-0248(98)00033-6},
  volume       = {53},
  year         = {1998},
}