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Modeling of the deposition of stoichiometric Al2O3 using non-arcing dc magnetron sputtering

Macak, Karol; Nyberg, Thomas; Macak, Peter; Olsson, Maryam LU ; Helmersson, Ulf and Berg, Sören (1998) In Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films 16(3). p.1286-1286
Abstract
dc sputter deposition of stoichiometric Al2O3 is usually difficult due to the formation of an oxidized layer on the target surface, which reduces the deposition rate drastically and causes charge buildup and arcing at the target. To avoid this situation the arrival rate ratio O2/Al must be high enough at the substrate position that a stoichiometric film can form but low enough at the target that a conducting target surface is maintained. We have utilized Monte Carlo simulations to estimate the flux distribution of sputtered particles for different geometries. These results, supplemented by Bergs’ standard steady state model for the reactive sputtering process, made it possible to predict the composition at different surfaces in the... (More)
dc sputter deposition of stoichiometric Al2O3 is usually difficult due to the formation of an oxidized layer on the target surface, which reduces the deposition rate drastically and causes charge buildup and arcing at the target. To avoid this situation the arrival rate ratio O2/Al must be high enough at the substrate position that a stoichiometric film can form but low enough at the target that a conducting target surface is maintained. We have utilized Monte Carlo simulations to estimate the flux distribution of sputtered particles for different geometries. These results, supplemented by Bergs’ standard steady state model for the reactive sputtering process, made it possible to predict the composition at different surfaces in the processing chamber. Experimental studies were carried out for several different target-to-substrate distances and a range of sputtering gas pressures. The results show that the process can be tailored to achieve stoichiometric Al2O3 at the substrates while keeping the target in the metallic state. This is achieved by providing a high enough inert gas pressure or large enough target-to-substrate distance. Thick stoichiometric Al2O3films were successfully deposited at these conditions with low or no arcing during deposition. A considerable back-deposition of Al on to the noneroded part of the target keeping the surfaces conducting is the key factor for the reduction of arcing. (Less)
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author
publishing date
type
Contribution to journal
publication status
published
subject
in
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
volume
16
issue
3
pages
1286 - 1286
publisher
American Vacuum Society
ISSN
1520-8559
DOI
10.1116/1.58127
language
English
LU publication?
no
id
2879c7f0-7002-466a-b0d9-fac0045036e4 (old id 4645052)
date added to LUP
2014-09-10 07:54:10
date last changed
2016-06-29 09:18:20
@article{2879c7f0-7002-466a-b0d9-fac0045036e4,
  abstract     = {dc sputter deposition of stoichiometric Al2O3 is usually difficult due to the formation of an oxidized layer on the target surface, which reduces the deposition rate drastically and causes charge buildup and arcing at the target. To avoid this situation the arrival rate ratio O2/Al must be high enough at the substrate position that a stoichiometric film can form but low enough at the target that a conducting target surface is maintained. We have utilized Monte Carlo simulations to estimate the flux distribution of sputtered particles for different geometries. These results, supplemented by Bergs’ standard steady state model for the reactive sputtering process, made it possible to predict the composition at different surfaces in the processing chamber. Experimental studies were carried out for several different target-to-substrate distances and a range of sputtering gas pressures. The results show that the process can be tailored to achieve stoichiometric Al2O3 at the substrates while keeping the target in the metallic state. This is achieved by providing a high enough inert gas pressure or large enough target-to-substrate distance. Thick stoichiometric Al2O3films were successfully deposited at these conditions with low or no arcing during deposition. A considerable back-deposition of Al on to the noneroded part of the target keeping the surfaces conducting is the key factor for the reduction of arcing.},
  author       = {Macak, Karol and Nyberg, Thomas and Macak, Peter and Olsson, Maryam and Helmersson, Ulf and Berg, Sören},
  issn         = {1520-8559},
  language     = {eng},
  number       = {3},
  pages        = {1286--1286},
  publisher    = {American Vacuum Society},
  series       = {Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films},
  title        = {Modeling of the deposition of stoichiometric Al2O3 using non-arcing dc magnetron sputtering},
  url          = {http://dx.doi.org/10.1116/1.58127},
  volume       = {16},
  year         = {1998},
}