High rate magnetron sputter deposition of thin Al oxide and Mo oxide films
(1997)- Abstract
- Abstract to be added
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4645411
- author
- Olsson, Maryam LU
- supervisor
- publishing date
- 1997
- type
- Thesis
- publication status
- published
- subject
- pages
- 91 pages
- publisher
- Uppsala universitet
- language
- English
- LU publication?
- no
- id
- da8f29b4-db8c-44c9-a3de-9704bb6144e2 (old id 4645411)
- date added to LUP
- 2016-04-04 10:50:07
- date last changed
- 2020-05-28 10:24:14
@misc{da8f29b4-db8c-44c9-a3de-9704bb6144e2, abstract = {{Abstract to be added}}, author = {{Olsson, Maryam}}, language = {{eng}}, note = {{Licentiate Thesis}}, publisher = {{Uppsala universitet}}, title = {{High rate magnetron sputter deposition of thin Al oxide and Mo oxide films}}, year = {{1997}}, }