High-rate reactive magnetron sputter deposition and characterization of metal oxide films
(2000)- Abstract
- to be added
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4645418
- author
- Olsson, Maryam LU
- supervisor
- opponent
-
- Consultant Westwood, William, Think Film Consulting Company, Ottawa, Canada
- publishing date
- 2000
- type
- Thesis
- publication status
- published
- subject
- pages
- 79 pages
- publisher
- Uppsala University
- defense location
- Uppsala University, Ångström laboratory
- defense date
- 2000-04-05 00:09:00
- ISBN
- 91-554-4683-3
- language
- English
- LU publication?
- no
- id
- dd0a3626-9a08-4849-9093-c15be09500eb (old id 4645418)
- date added to LUP
- 2016-04-01 15:20:12
- date last changed
- 2020-03-19 11:36:45
@phdthesis{dd0a3626-9a08-4849-9093-c15be09500eb,
abstract = {{to be added}},
author = {{Olsson, Maryam}},
isbn = {{91-554-4683-3}},
language = {{eng}},
publisher = {{Uppsala University}},
title = {{High-rate reactive magnetron sputter deposition and characterization of metal oxide films}},
year = {{2000}},
}