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Diffusion barrier layer and method for manufacturing a diffusion barrier layer using PECVD technology

Olsson, Maryam LU ; Tran Quoc, H. and Gallissian, Alice (2005) WO2005/081333A2
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author
publishing date
type
Patent
publication status
published
subject
patent number
WO2005/081333A2
language
English
LU publication?
no
id
c700bf17-ef3c-4be2-b887-382cb22b0164 (old id 4645895)
date added to LUP
2014-09-11 15:38:13
date last changed
2016-06-29 09:05:27
@misc{c700bf17-ef3c-4be2-b887-382cb22b0164,
  author       = {Olsson, Maryam and Tran Quoc, H. and Gallissian, Alice},
  language     = {eng},
  note         = {Patent, Patent Number: WO2005/081333A2},
  title        = {Diffusion barrier layer and method for manufacturing a diffusion barrier layer using PECVD technology},
  year         = {2005},
}