Fabrication and Characterisations of New Ultra-thin Silicon Detectors as Pre-Cell Hit Detectors for a Cell Irradiation Facility at LIBAF
(2013)- Abstract
- For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis
facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the
fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different
thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The
fabrication and packaging processes of these devices were carried out on the double-polished silicon
substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our
thin detectors were a very low leakage current below 12 nA and a low... (More) - For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis
facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the
fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different
thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The
fabrication and packaging processes of these devices were carried out on the double-polished silicon
substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our
thin detectors were a very low leakage current below 12 nA and a low full depletion voltage at a reverse bias
less than 1.5 V. The performance of the thin detectors as particle trackers was investigated with 5.487 MeV
alpha particles, obtaining a good energy resolution (FWHM) and high efficiency. During the detector tests
as a pre-detection stage of 2.55 MeV protons in ΔE-E configuration, the results showed that best performing
detector 9.7 μm thick, had a detection efficiency of 96%. This efficiency is good enough to be utilized as
good single-proton identifier. In conclusion, the fabricated devices are well suited for living cell irradiation
experiments. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/4780436
- author
- Salim, Naseem LU
- supervisor
-
- Jan Pallon LU
- Per Kristiansson LU
- organization
- publishing date
- 2013
- type
- Thesis
- publication status
- published
- subject
- keywords
- SIHF, ΔE detector, single ions, Ultra-thin silicon detector and Microfabrication
- categories
- Higher Education
- pages
- 35 pages
- publisher
- Lund University
- external identifiers
-
- other:LUTFD2 / (TFKF-3104)/ 1-43/2013
- language
- English
- LU publication?
- yes
- additional info
- The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Nuclear Physics (Faculty of Technology) (011013007)
- id
- 3ba2532a-6ff1-45ac-ac5c-e605a6cc2a29 (old id 4780436)
- date added to LUP
- 2016-04-04 10:37:03
- date last changed
- 2018-11-21 20:59:48
@misc{3ba2532a-6ff1-45ac-ac5c-e605a6cc2a29, abstract = {{For the development of single–ion irradiation system for living cells at the Lund Ion Beam Analysis<br/><br> facility (LIBAF) newly developed pre-cell (PC) detectors have been investigated. Central to the thesis is the<br/><br> fabrication and initial characterization of more than 100 ultra-thin silicon detectors having different<br/><br> thicknesses down to 5 μm with active areas ranging from 0.71 to 0.172 mm2, to be used as PC detectors. The<br/><br> fabrication and packaging processes of these devices were carried out on the double-polished silicon<br/><br> substrate n-type wafer using Silicon Microfabrication Technology. The main design considerations of our<br/><br> thin detectors were a very low leakage current below 12 nA and a low full depletion voltage at a reverse bias<br/><br> less than 1.5 V. The performance of the thin detectors as particle trackers was investigated with 5.487 MeV<br/><br> alpha particles, obtaining a good energy resolution (FWHM) and high efficiency. During the detector tests<br/><br> as a pre-detection stage of 2.55 MeV protons in ΔE-E configuration, the results showed that best performing<br/><br> detector 9.7 μm thick, had a detection efficiency of 96%. This efficiency is good enough to be utilized as<br/><br> good single-proton identifier. In conclusion, the fabricated devices are well suited for living cell irradiation<br/><br> experiments.}}, author = {{Salim, Naseem}}, keywords = {{SIHF; ΔE detector; single ions; Ultra-thin silicon detector and Microfabrication}}, language = {{eng}}, note = {{Licentiate Thesis}}, publisher = {{Lund University}}, title = {{Fabrication and Characterisations of New Ultra-thin Silicon Detectors as Pre-Cell Hit Detectors for a Cell Irradiation Facility at LIBAF}}, year = {{2013}}, }