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Next generation nanotechnologies for sensor array fabrication

Montelius, Lars LU ; Beck, Marc LU ; Ling, T.; Carlberg, Patrick LU ; Graczyk, Mariusz LU ; Maximov, Ivan LU and Sarwe, Eva-Lena LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21) In 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
Abstract
New emerging technologies such as nanoimprint lithography (NIL) offers the biosensor research community the possibility to fabricate low-cost biodevices having nanometer dimensions. Such nanosized devices can be applied as biosensors where new functions might emerge due to the nanoscale dimensions. In this paper we will discuss various nanolithography methods as well as the benefits of going to the nanoscale for biosensor applications. We will also show results from mixed NIL and UV-lithography for fabrication of interdigitated nanobiosensor electrodes on up to 6'' large Si wafers. The electrode and inter-electrode distances were 100 nm wide over a total area of 200 μm×200 μm. We will also show the obtained enhanced efficiency of... (More)
New emerging technologies such as nanoimprint lithography (NIL) offers the biosensor research community the possibility to fabricate low-cost biodevices having nanometer dimensions. Such nanosized devices can be applied as biosensors where new functions might emerge due to the nanoscale dimensions. In this paper we will discuss various nanolithography methods as well as the benefits of going to the nanoscale for biosensor applications. We will also show results from mixed NIL and UV-lithography for fabrication of interdigitated nanobiosensor electrodes on up to 6'' large Si wafers. The electrode and inter-electrode distances were 100 nm wide over a total area of 200 μm×200 μm. We will also show the obtained enhanced efficiency of redox-recycling when utilizing such nanoscaled biosensors (Less)
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organization
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Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
interelectrode distances, Si wafers, interdigitated nanobiosensor electrodes, UV lithography, nanolithography, nanosized devices, nanometer dimensions, low cost biodevices, biosensor, nanoimprint lithography, sensor array fabrication, nanotechnology, Si, SiO<sub>2</sub>-Si, 100 nm, 200 micron, 6 inch, redox recycling
in
7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science
pages
2 pages
publisher
Lund University
conference name
Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
language
English
LU publication?
yes
id
696750b9-9ce9-42f6-9238-c3da826d1341 (old id 610460)
date added to LUP
2007-11-28 11:40:25
date last changed
2016-04-16 08:53:39
@inproceedings{696750b9-9ce9-42f6-9238-c3da826d1341,
  abstract     = {New emerging technologies such as nanoimprint lithography (NIL) offers the biosensor research community the possibility to fabricate low-cost biodevices having nanometer dimensions. Such nanosized devices can be applied as biosensors where new functions might emerge due to the nanoscale dimensions. In this paper we will discuss various nanolithography methods as well as the benefits of going to the nanoscale for biosensor applications. We will also show results from mixed NIL and UV-lithography for fabrication of interdigitated nanobiosensor electrodes on up to 6'' large Si wafers. The electrode and inter-electrode distances were 100 nm wide over a total area of 200 μm×200 μm. We will also show the obtained enhanced efficiency of redox-recycling when utilizing such nanoscaled biosensors},
  author       = {Montelius, Lars and Beck, Marc and Ling, T. and Carlberg, Patrick and Graczyk, Mariusz and Maximov, Ivan and Sarwe, Eva-Lena},
  booktitle    = {7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science},
  keyword      = {interelectrode distances,Si wafers,interdigitated nanobiosensor electrodes,UV lithography,nanolithography,nanosized devices,nanometer dimensions,low cost biodevices,biosensor,nanoimprint lithography,sensor array fabrication,nanotechnology,Si,SiO<sub>2</sub>-Si,100 nm,200 micron,6 inch,redox recycling},
  language     = {eng},
  pages        = {2},
  publisher    = {Lund University},
  title        = {Next generation nanotechnologies for sensor array fabrication},
  year         = {2002},
}