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Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications

Törndahl, Marcus LU ; Almqvist, Monica LU ; Wallman, Lars LU ; Persson, Hans W LU and Lindström, Kjell LU (2002) IEEE Ultrasonics Symposium, 2002 In 2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388) p.1023-1026
Abstract
The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography... (More)
The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers (Less)
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organization
publishing date
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Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
membrane thickness, distance working range, linearity plots, SNR, S/N ratio, FFT spectra, metallized polymeric membrane, pyramid-shaped cavities, Si backplate, light diffraction tomography, transducer radiation field, capacitive micromachined US transducer, air applications, piezoelectric US transducer, ultrasonic transducer comparison, cavity size, pressure maps, bias voltage, bandwidth, 450 kHz, Si
in
2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)
pages
1023 - 1026
publisher
IEEE--Institute of Electrical and Electronics Engineers Inc.
conference name
IEEE Ultrasonics Symposium, 2002
external identifiers
  • wos:000182111700228
  • scopus:0036990242
ISBN
0-7803-7582-3
DOI
10.1109/ULTSYM.2002.1192469
language
English
LU publication?
yes
id
16f61a6a-b985-4321-b600-284f97257420 (old id 610760)
date added to LUP
2007-11-29 11:05:43
date last changed
2017-01-01 07:59:15
@inproceedings{16f61a6a-b985-4321-b600-284f97257420,
  abstract     = {The main objectives with this investigation are firstly to compare important parameters of a capacitive micromachined ultrasonic transducer (cMUT) for air applications with a corresponding piezoelectric ultrasonic transducer. Secondly, to characterise the cMUT's radiation field using light diffraction tomography. The cMUTs consist of a silicon backplate with small pyramid-shaped cavities and a metallised polymeric membrane. The piezoelectric transducers are nonfocused with a resonance frequency of 450 kHz. Time waveforms, FFT-spectra, S/N-ratio, linearity plots and distance working range are presented for different kinds of combinations of cavity size, membrane thickness and bias voltage. Pressure maps from light diffraction tomography measurements are also presented. The principal conclusions are that the cMUTs have comparable linearity and sensitivity but exhibit superior bandwidth to the compared piezoelectric transducers},
  author       = {Törndahl, Marcus and Almqvist, Monica and Wallman, Lars and Persson, Hans W and Lindström, Kjell},
  booktitle    = {2002 IEEE Ultrasonics Symposium. Proceedings (Cat. No.02CH37388)},
  isbn         = {0-7803-7582-3},
  keyword      = {membrane thickness,distance working range,linearity plots,SNR,S/N ratio,FFT spectra,metallized polymeric membrane,pyramid-shaped cavities,Si backplate,light diffraction tomography,transducer radiation field,capacitive micromachined US transducer,air applications,piezoelectric US transducer,ultrasonic transducer comparison,cavity size,pressure maps,bias voltage,bandwidth,450 kHz,Si},
  language     = {eng},
  pages        = {1023--1026},
  publisher    = {IEEE--Institute of Electrical and Electronics Engineers Inc.},
  title        = {Characterisation and comparison of a cMUT versus a piezoelectric transducer for air applications},
  url          = {http://dx.doi.org/10.1109/ULTSYM.2002.1192469},
  year         = {2002},
}