Nanoimprint lithography: opportunities and applications
(2002) Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference p.18-19- Abstract
- In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor... (More)
- In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor proteins. Then, finally in I will give conclude my talk and give some outlooks and prospects for the implementation of NIL in various application areas (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/610911
- author
- Montelius, Lars LU
- organization
- publishing date
- 2002
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- nanoimprint lithography
- host publication
- Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.02EX589)
- pages
- 18 - 19
- publisher
- Japan Soc. Appl. Phys
- conference name
- Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference
- conference location
- Tokyo, Japan
- conference dates
- 2002-11-06 - 2002-11-08
- external identifiers
-
- scopus:84960395437
- ISBN
- 4-89114-031-3
- DOI
- 10.1109/IMNC.2002.1178522
- language
- English
- LU publication?
- yes
- id
- fa03c5aa-e83e-434d-b202-14d1bd48e626 (old id 610911)
- date added to LUP
- 2016-04-04 10:46:35
- date last changed
- 2022-02-13 20:17:33
@inproceedings{fa03c5aa-e83e-434d-b202-14d1bd48e626, abstract = {{In the first part of this presentation I will highlight the understanding about nanoimprint lithography (NIL) we have developed within the two EU projects that I have been privileged to coordinate, NANOTECH and CHANIL. In the second part I will concentrate on various applications that has been successfully implemented using NIL and the concerns related to NIL for applications. This will include fabrication of electronic devices such as three terminal ballistic devices, position sensitive radiation detectors, biosensors, high frequency nanoelectromechanical systems, development of materials and patterns to increase bio-compatability and lab-on-a-chip implementations allowing, for example, in-vitro studies of controlled motion of motor proteins. Then, finally in I will give conclude my talk and give some outlooks and prospects for the implementation of NIL in various application areas}}, author = {{Montelius, Lars}}, booktitle = {{Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.02EX589)}}, isbn = {{4-89114-031-3}}, keywords = {{nanoimprint lithography}}, language = {{eng}}, pages = {{18--19}}, publisher = {{Japan Soc. Appl. Phys}}, title = {{Nanoimprint lithography: opportunities and applications}}, url = {{http://dx.doi.org/10.1109/IMNC.2002.1178522}}, doi = {{10.1109/IMNC.2002.1178522}}, year = {{2002}}, }