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High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide

Olsson, Maryam LU ; Kullman, Lisen and Granqvist, Claes Göran (1998) In Solar Energy Materials and Solar Cells 53(3-4). p.349-356
Abstract
Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.
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author
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publishing date
type
Contribution to journal
publication status
published
subject
keywords
Thin films, Sputter deposition, Molybdenum oxide, Smart windows
in
Solar Energy Materials and Solar Cells
volume
53
issue
3-4
pages
349 - 356
publisher
Elsevier
external identifiers
  • scopus:0032097159
ISSN
0927-0248
DOI
10.1016/S0927-0248(98)00033-6
language
English
LU publication?
no
id
6129d86e-f850-4ed6-b492-f2b74dfd1081 (old id 4643607)
date added to LUP
2016-04-01 17:04:13
date last changed
2022-01-29 00:06:35
@article{6129d86e-f850-4ed6-b492-f2b74dfd1081,
  abstract     = {{Mo oxide films were prepared by dual-target reactive DC magnetron sputtering under conditions leading to films that were blue in as-deposited state. The deposition rate for this “blue” Mo oxide was as high as 1.5 nm/s, to be compared to ∼0.85 and ∼0.1 nm/s for highly transparent Mo oxide films made with dual-target and single-target sputtering, respectively. Good electrochromic properties of the “blue” films evolved after ∼5 colour/bleach cycles in a Li+ conducting electrolyte.}},
  author       = {{Olsson, Maryam and Kullman, Lisen and Granqvist, Claes Göran}},
  issn         = {{0927-0248}},
  keywords     = {{Thin films; Sputter deposition; Molybdenum oxide; Smart windows}},
  language     = {{eng}},
  number       = {{3-4}},
  pages        = {{349--356}},
  publisher    = {{Elsevier}},
  series       = {{Solar Energy Materials and Solar Cells}},
  title        = {{High-rate dual-target dc magnetron sputtering of "blue" electromagnetic Mo oxide}},
  url          = {{http://dx.doi.org/10.1016/S0927-0248(98)00033-6}},
  doi          = {{10.1016/S0927-0248(98)00033-6}},
  volume       = {{53}},
  year         = {{1998}},
}