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Open-Air Combustion Synthesis with Rapid Plasma Processing of Large-Area Transparent Conducting Oxides

Colburn, Thomas W. ; Flick, Austin C. ; Just, Justus LU orcid ; Miller, Robert D. and Dauskardt, Reinhold H. (2025) In Small 21(32).
Abstract

A vacuum-free, high-throughput synthesis of indium tin oxide (ITO) via Combustion Oxidation with Rapid Plasma Processing (CORP) utilizes a solution-based exothermic combustion reaction to generate the oxide with tunable control of either amorphous or crystalline phases. A subsequent open-air, forming gas plasma treatment is used to introduce oxygen vacancies and promote crystallization. The evolution of the oxide structure is elucidated by extended X-ray absorption spectroscopy fine structure analysis. Using CORP, fabrication of 300 cm2 of ITO possessing a champion sheet resistance of 38 Ω sq.−1, visible transmission of 89%, conductivity stability for over 250 days, roughness < 2nm, and Haacke figure of merit... (More)

A vacuum-free, high-throughput synthesis of indium tin oxide (ITO) via Combustion Oxidation with Rapid Plasma Processing (CORP) utilizes a solution-based exothermic combustion reaction to generate the oxide with tunable control of either amorphous or crystalline phases. A subsequent open-air, forming gas plasma treatment is used to introduce oxygen vacancies and promote crystallization. The evolution of the oxide structure is elucidated by extended X-ray absorption spectroscopy fine structure analysis. Using CORP, fabrication of 300 cm2 of ITO possessing a champion sheet resistance of 38 Ω sq.−1, visible transmission of 89%, conductivity stability for over 250 days, roughness < 2nm, and Haacke figure of merit (%T550nm10/Rs) of 0.012 Ω−1 is achieved. Cost modeling of CORP demonstrates up to a 67% reduction in price for TCOs using fully continuous, in-line unit operations compared with vacuum sputtering. The work shows a path toward a low-cost, vacuum-free manufacturing method for TCOs at commercial scales.

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author
; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
cost modeling, device manufacturing, indium tin oxide, perovskite solar cells, thin film, transparent conducting oxides, ultrasonic spray
in
Small
volume
21
issue
32
article number
2503252
publisher
John Wiley & Sons Inc.
external identifiers
  • scopus:105008383820
  • pmid:40522267
ISSN
1613-6810
DOI
10.1002/smll.202503252
language
English
LU publication?
yes
additional info
Publisher Copyright: © 2025 Wiley-VCH GmbH.
id
6188ffa6-d016-4e93-baf6-85545b029143
date added to LUP
2026-01-08 16:45:51
date last changed
2026-01-08 16:46:22
@article{6188ffa6-d016-4e93-baf6-85545b029143,
  abstract     = {{<p>A vacuum-free, high-throughput synthesis of indium tin oxide (ITO) via Combustion Oxidation with Rapid Plasma Processing (CORP) utilizes a solution-based exothermic combustion reaction to generate the oxide with tunable control of either amorphous or crystalline phases. A subsequent open-air, forming gas plasma treatment is used to introduce oxygen vacancies and promote crystallization. The evolution of the oxide structure is elucidated by extended X-ray absorption spectroscopy fine structure analysis. Using CORP, fabrication of 300 cm<sup>2</sup> of ITO possessing a champion sheet resistance of 38 Ω sq.<sup>−1</sup>, visible transmission of 89%, conductivity stability for over 250 days, roughness &lt; 2nm, and Haacke figure of merit (%T<sub>550nm</sub><sup>10</sup>/R<sub>s</sub>) of 0.012 Ω<sup>−1</sup> is achieved. Cost modeling of CORP demonstrates up to a 67% reduction in price for TCOs using fully continuous, in-line unit operations compared with vacuum sputtering. The work shows a path toward a low-cost, vacuum-free manufacturing method for TCOs at commercial scales.</p>}},
  author       = {{Colburn, Thomas W. and Flick, Austin C. and Just, Justus and Miller, Robert D. and Dauskardt, Reinhold H.}},
  issn         = {{1613-6810}},
  keywords     = {{cost modeling; device manufacturing; indium tin oxide; perovskite solar cells; thin film; transparent conducting oxides; ultrasonic spray}},
  language     = {{eng}},
  month        = {{08}},
  number       = {{32}},
  publisher    = {{John Wiley & Sons Inc.}},
  series       = {{Small}},
  title        = {{Open-Air Combustion Synthesis with Rapid Plasma Processing of Large-Area Transparent Conducting Oxides}},
  url          = {{http://dx.doi.org/10.1002/smll.202503252}},
  doi          = {{10.1002/smll.202503252}},
  volume       = {{21}},
  year         = {{2025}},
}