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Effect of phase composition on X-ray absorption spectra of ZrO2 thin films

Kikas, A.; Aarik, J.; Kisand, V.; Kooser, K.; Kaambre, T.; Mandar, H.; Uustare, T.; Rammula, R.; Sammelselg, V. and Martinson, Indrek LU (2007) In Journal of Electron Spectroscopy and Related Phenomena 156. p.303-306
Abstract
The X-ray photoabsorption spectra of ZrO2 films with different phase compositions were measured. The analysis of the results obtained shows that due to the site-sensitivity the X-ray photoabsorption spectroscopy is an attractive method for characterization of the ZrO2 structure. This allows application of the X-ray spectroscopy in investigation of the crystal structure in the various stages of the thin film growth including the initial stage of the ZrO2 growth. (c) 2006 Elsevier B.V. All rights reserved.
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
atomic layer deposition, zirconium dioxide, X-ray absorption spectra
in
Journal of Electron Spectroscopy and Related Phenomena
volume
156
pages
303 - 306
publisher
Elsevier
external identifiers
  • wos:000246726300314
  • scopus:34247173343
ISSN
0368-2048
DOI
10.1016/j.elspec.2006.11.031
language
English
LU publication?
yes
id
0e70c826-f090-4871-9795-6c32aac368b3 (old id 663537)
date added to LUP
2007-12-13 11:49:24
date last changed
2017-01-01 07:17:33
@article{0e70c826-f090-4871-9795-6c32aac368b3,
  abstract     = {The X-ray photoabsorption spectra of ZrO2 films with different phase compositions were measured. The analysis of the results obtained shows that due to the site-sensitivity the X-ray photoabsorption spectroscopy is an attractive method for characterization of the ZrO2 structure. This allows application of the X-ray spectroscopy in investigation of the crystal structure in the various stages of the thin film growth including the initial stage of the ZrO2 growth. (c) 2006 Elsevier B.V. All rights reserved.},
  author       = {Kikas, A. and Aarik, J. and Kisand, V. and Kooser, K. and Kaambre, T. and Mandar, H. and Uustare, T. and Rammula, R. and Sammelselg, V. and Martinson, Indrek},
  issn         = {0368-2048},
  keyword      = {atomic layer deposition,zirconium dioxide,X-ray absorption spectra},
  language     = {eng},
  pages        = {303--306},
  publisher    = {Elsevier},
  series       = {Journal of Electron Spectroscopy and Related Phenomena},
  title        = {Effect of phase composition on X-ray absorption spectra of ZrO2 thin films},
  url          = {http://dx.doi.org/10.1016/j.elspec.2006.11.031},
  volume       = {156},
  year         = {2007},
}