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Fabrication of micro-mechanical sensors with the polymer SU-8

Keller, S. ; Tenje, Maria LU ; Noeth, N. ; Dohn, S. ; Blagoi, G. ; Haefliger, D. and Boisen, A. (2009) Eurosensors XXIII
Abstract
In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.
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author
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publishing date
type
Contribution to conference
publication status
published
subject
conference name
Eurosensors XXIII
conference location
Lausanne, Switzerland
conference dates
2009-09-06 - 2009-09-09
language
English
LU publication?
no
id
6793f9cc-045d-4dd5-b3aa-e98241846a31 (old id 3233217)
date added to LUP
2016-04-04 13:28:07
date last changed
2018-11-21 21:14:11
@misc{6793f9cc-045d-4dd5-b3aa-e98241846a31,
  abstract     = {{In this paper, we present the design and fabrication of biosensors based on SU-8 cantilevers with a thickness ≤ 5μm. The processing of the polymer was optimized to reduce initial bending of the devices which is essential for optical read-out of the cantilever deflection. Solvent absorption in the SU-8 had to be minimized to reduce drift of the cantilever bending during measurements in liquid. The shelf-life of the sensors was improved to enable storage for several months. Further, we introduced methods for process integrated metallization, backside passivation and surface functionalization allowing the fabrication of a variety of cantilever-based sensors.}},
  author       = {{Keller, S. and Tenje, Maria and Noeth, N. and Dohn, S. and Blagoi, G. and Haefliger, D. and Boisen, A.}},
  language     = {{eng}},
  title        = {{Fabrication of micro-mechanical sensors with the polymer SU-8}},
  year         = {{2009}},
}