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Displacement Talbot Lithography for Fabrication of Large Area Nanoimprint Stamps

Graczyk, Mariusz LU ; Asif, Muhammad LU and Maximov, Ivan LU (2019) 45-th International Conference on Micro and Nano Engineering
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author
; and
organization
publishing date
type
Contribution to conference
publication status
unpublished
subject
conference name
45-th International Conference on Micro and Nano Engineering
conference location
Rhodos, Greece
conference dates
2019-09-23 - 2019-09-26
language
English
LU publication?
yes
id
6daf0a90-0830-4e04-9265-974780fb9ba2
date added to LUP
2020-01-21 14:14:07
date last changed
2022-04-06 12:37:14
@misc{6daf0a90-0830-4e04-9265-974780fb9ba2,
  author       = {{Graczyk, Mariusz and Asif, Muhammad and Maximov, Ivan}},
  language     = {{eng}},
  month        = {{09}},
  title        = {{Displacement Talbot Lithography for Fabrication of Large Area Nanoimprint Stamps}},
  year         = {{2019}},
}