Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning
Chalangar, Ebrahim ; Nur, Omer ; Willander, Magnus ; Gustafsson, Anders LU
and Pettersson, Håkan
LU
(2021)
In Nanoscale Research Letters
16(1).
- Abstract
Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method... (More)
Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.
(Less)
- author
- Chalangar, Ebrahim
; Nur, Omer
; Willander, Magnus
; Gustafsson, Anders
LU
and Pettersson, Håkan
LU
- organization
- publishing date
- 2021
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Chemical bath deposition, Colloidal lithography, Nanofabrication, Nanorod arrays, Seed layer, Sol-gel, Vertical growth, Zinc oxide
- in
- Nanoscale Research Letters
- volume
- 16
- issue
- 1
- article number
- 46
- publisher
- Springer
- external identifiers
-
- pmid:33709294
- scopus:85102445623
- ISSN
- 1931-7573
- DOI
- 10.1186/s11671-021-03500-7
- language
- English
- LU publication?
- yes
- id
- 7608cecc-8bab-4782-b94c-48a7ccf2ac98
- date added to LUP
- 2021-03-29 10:53:17
- date last changed
- 2024-06-29 09:50:29
@article{7608cecc-8bab-4782-b94c-48a7ccf2ac98,
abstract = {{<p>Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.</p>}},
author = {{Chalangar, Ebrahim and Nur, Omer and Willander, Magnus and Gustafsson, Anders and Pettersson, Håkan}},
issn = {{1931-7573}},
keywords = {{Chemical bath deposition; Colloidal lithography; Nanofabrication; Nanorod arrays; Seed layer; Sol-gel; Vertical growth; Zinc oxide}},
language = {{eng}},
number = {{1}},
publisher = {{Springer}},
series = {{Nanoscale Research Letters}},
title = {{Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning}},
url = {{http://dx.doi.org/10.1186/s11671-021-03500-7}},
doi = {{10.1186/s11671-021-03500-7}},
volume = {{16}},
year = {{2021}},
}