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Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning

Chalangar, Ebrahim ; Nur, Omer ; Willander, Magnus ; Gustafsson, Anders LU orcid and Pettersson, Håkan LU (2021) In Nanoscale Research Letters 16(1).
Abstract

Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method... (More)

Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.

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author
; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Chemical bath deposition, Colloidal lithography, Nanofabrication, Nanorod arrays, Seed layer, Sol-gel, Vertical growth, Zinc oxide
in
Nanoscale Research Letters
volume
16
issue
1
article number
46
publisher
Springer
external identifiers
  • scopus:85102445623
  • pmid:33709294
ISSN
1931-7573
DOI
10.1186/s11671-021-03500-7
language
English
LU publication?
yes
id
7608cecc-8bab-4782-b94c-48a7ccf2ac98
date added to LUP
2021-03-29 10:53:17
date last changed
2024-06-15 08:42:01
@article{7608cecc-8bab-4782-b94c-48a7ccf2ac98,
  abstract     = {{<p>Different ZnO nanostructures can be grown using low-cost chemical bath deposition. Although this technique is cost-efficient and flexible, the final structures are usually randomly oriented and hardly controllable in terms of homogeneity and surface density. In this work, we use colloidal lithography to pattern (100) silicon substrates to fully control the nanorods' morphology and density. Moreover, a sol-gel prepared ZnO seed layer was employed to compensate for the lattice mismatch between the silicon substrate and ZnO nanorods. The results show a successful growth of vertically aligned ZnO nanorods with controllable diameter and density in the designated openings in the patterned resist mask deposited on the seed layer. Our method can be used to fabricate optimized devices where vertically ordered ZnO nanorods of high crystalline quality are crucial for the device performance.</p>}},
  author       = {{Chalangar, Ebrahim and Nur, Omer and Willander, Magnus and Gustafsson, Anders and Pettersson, Håkan}},
  issn         = {{1931-7573}},
  keywords     = {{Chemical bath deposition; Colloidal lithography; Nanofabrication; Nanorod arrays; Seed layer; Sol-gel; Vertical growth; Zinc oxide}},
  language     = {{eng}},
  number       = {{1}},
  publisher    = {{Springer}},
  series       = {{Nanoscale Research Letters}},
  title        = {{Synthesis of Vertically Aligned ZnO Nanorods Using Sol-gel Seeding and Colloidal Lithography Patterning}},
  url          = {{http://dx.doi.org/10.1186/s11671-021-03500-7}},
  doi          = {{10.1186/s11671-021-03500-7}},
  volume       = {{16}},
  year         = {{2021}},
}