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In-situ heat treatment study on the nanocrystalline Cr 2 O 3 film using an environmental scanning electron microscope

Wang, Tie Gang ; Dong, Yu ; Liu, Yanmei ; Iyengar, Srinivasan LU ; Kim, Kwang Ho and Yang, Zubing (2017) In Coatings 7(12).
Abstract


In this work, the surface morphology changes of nanocrystalline Cr
2
O
3
film deposited on Si wafer during the heating process were observed in-situ by means of an environmental scanning electron microscope (ESEM). The Cr
2
O
... (More)


In this work, the surface morphology changes of nanocrystalline Cr
2
O
3
film deposited on Si wafer during the heating process were observed in-situ by means of an environmental scanning electron microscope (ESEM). The Cr
2
O
3
film cracked at high temperature due to the cause of thermal stress; the corresponding crack area percentages on the film surface were real-time evaluated using image analysis software (SISC IAS V8.0) based on the principle of gray value analysis. In the meantime, the effects of the heating temperature on the crack area percentage, phase constituents, and grain size of the Cr
2
O
3
film were also studied in detail. The results showed that the percentage of crack area on film surface first increased with the heating temperature rise, and reached the maximum value at around 980 °C, and then gradually declined again. The above trend is closely related to the changes of thermal stress and grain growth in film. In addition, the heat treatment also had a strong influence on the grain size of the Cr
2
O
3
film.

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author
; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Arc ion plating, Cr O film, Crack area percentage, ESEM, Grain size, In-situ observation
in
Coatings
volume
7
issue
12
article number
225
publisher
MDPI AG
external identifiers
  • scopus:85063846095
ISSN
2079-6412
DOI
10.3390/coatings7120225
language
English
LU publication?
yes
id
8b480380-764d-4362-a2ac-67327c9949ff
date added to LUP
2019-04-23 15:10:10
date last changed
2022-04-25 22:56:33
@article{8b480380-764d-4362-a2ac-67327c9949ff,
  abstract     = {{<p><br>
                                                         In this work, the surface morphology changes of nanocrystalline Cr                             <br>
                            <sub>2</sub><br>
                                                         O                             <br>
                            <sub>3</sub><br>
                                                          film deposited on Si wafer during the heating process were observed in-situ by means of an environmental scanning electron microscope (ESEM). The Cr                             <br>
                            <sub>2</sub><br>
                                                         O                             <br>
                            <sub>3</sub><br>
                                                          film cracked at high temperature due to the cause of thermal stress; the corresponding crack area percentages on the film surface were real-time evaluated using image analysis software (SISC IAS V8.0) based on the principle of gray value analysis. In the meantime, the effects of the heating temperature on the crack area percentage, phase constituents, and grain size of the Cr                             <br>
                            <sub>2</sub><br>
                                                         O                             <br>
                            <sub>3</sub><br>
                                                          film were also studied in detail. The results showed that the percentage of crack area on film surface first increased with the heating temperature rise, and reached the maximum value at around 980 °C, and then gradually declined again. The above trend is closely related to the changes of thermal stress and grain growth in film. In addition, the heat treatment also had a strong influence on the grain size of the Cr                             <br>
                            <sub>2</sub><br>
                                                         O                             <br>
                            <sub>3</sub><br>
                                                          film.                         <br>
                        </p>}},
  author       = {{Wang, Tie Gang and Dong, Yu and Liu, Yanmei and Iyengar, Srinivasan and Kim, Kwang Ho and Yang, Zubing}},
  issn         = {{2079-6412}},
  keywords     = {{Arc ion plating; Cr O film; Crack area percentage; ESEM; Grain size; In-situ observation}},
  language     = {{eng}},
  number       = {{12}},
  publisher    = {{MDPI AG}},
  series       = {{Coatings}},
  title        = {{In-situ heat treatment study on the nanocrystalline Cr                         
                        <sub>2</sub>
                                                 O                         
                        <sub>3</sub>
                                                  film using an environmental scanning electron microscope}},
  url          = {{http://dx.doi.org/10.3390/coatings7120225}},
  doi          = {{10.3390/coatings7120225}},
  volume       = {{7}},
  year         = {{2017}},
}