Characterisation of SU-8 as a platform for cantilever sensors
(2006) 1st International workshop on nanomechanical sensors p.76-77
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3288062
- author
- Tenje, Maria LU ; Calleja, M. and Boisen, A.
- publishing date
- 2006
- type
- Contribution to conference
- publication status
- published
- subject
- pages
- 76 - 77
- conference name
- 1st International workshop on nanomechanical sensors
- conference location
- Copenhagen, Denmark
- conference dates
- 2006-05-08 - 2006-05-12
- language
- English
- LU publication?
- no
- id
- 9546c616-1d8c-4ec4-a823-e72c277c786c (old id 3288062)
- date added to LUP
- 2016-04-04 13:30:42
- date last changed
- 2018-11-21 21:14:27
@misc{9546c616-1d8c-4ec4-a823-e72c277c786c,
author = {{Tenje, Maria and Calleja, M. and Boisen, A.}},
language = {{eng}},
pages = {{76--77}},
title = {{Characterisation of SU-8 as a platform for cantilever sensors}},
year = {{2006}},
}