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Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping

Forsén, E; Carlberg, Patrick LU ; Montelius, Lars LU and Boisen, A (2004) Micro Nano Engin, 2003 In Microelectr Engin 73-74, 491-495 (2004)
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author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
in
Microelectr Engin 73-74, 491-495 (2004)
conference name
Micro Nano Engin, 2003
external identifiers
  • scopus:2542493502
language
English
LU publication?
yes
id
0443a53d-cc12-44e6-b8e1-cc511977812c (old id 962293)
date added to LUP
2008-01-28 17:10:24
date last changed
2017-01-01 08:17:37
@inproceedings{0443a53d-cc12-44e6-b8e1-cc511977812c,
  author       = {Forsén, E and Carlberg, Patrick and Montelius, Lars and Boisen, A},
  booktitle    = {Microelectr Engin 73-74, 491-495 (2004)},
  language     = {eng},
  title        = {Laser lithography on resist bi-layer for nanoelectromechanical systems prototyping},
  year         = {2004},
}