Skip to main content

Lund University Publications

LUND UNIVERSITY LIBRARIES

Characterization and Evaluation of Ti-Zr-V Non-evaporable Getter Films Used in Vacuum Systems

Ferreira, M. J. LU ; Seraphim, R. M. ; Ramirez, A. J. ; Tabacniks, M. H. and Nascente, P. A.P. (2012) 18th International Vacuum Congress, IVC 2010 In Physics Procedia 32. p.840-852
Abstract

Among several methods used to obtain ultra-high vacuum (UHV) for particles accelerators chambers, it stands out the internal coating with metallic films capable of absorbing gases, called NEG (non-evaporable getter). Usually these materials are constituted by elements of great chemical reactivity and solubility (such as Ti, Zr, and V), at room temperature for oxygen and other gases typically found in UHV, such as H2, CO, and CO2. Gold and ternary Ti-Zr-V films were produced by magnetron sputtering, and their composition, structure, morphology, and aging characteristics were characterized by energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), field emission... (More)

Among several methods used to obtain ultra-high vacuum (UHV) for particles accelerators chambers, it stands out the internal coating with metallic films capable of absorbing gases, called NEG (non-evaporable getter). Usually these materials are constituted by elements of great chemical reactivity and solubility (such as Ti, Zr, and V), at room temperature for oxygen and other gases typically found in UHV, such as H2, CO, and CO2. Gold and ternary Ti-Zr-V films were produced by magnetron sputtering, and their composition, structure, morphology, and aging characteristics were characterized by energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), field emission gun sc anning electronmicroscopy (FEG-SEM), atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM). The comparison between the produced films and commercial samples indicated that the desirable characteristics depend on the nanometric structure of the films and that this structure is sensitive to the heat treatments.

(Less)
Please use this url to cite or link to this publication:
author
; ; ; and
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM), NEG, thermal treatment, X-ray diffraction (XRD)
host publication
18th International Vacuum Congress, IVC 2010
series title
Physics Procedia
editor
Pan, Feng and Chen, Xu
volume
32
pages
13 pages
publisher
Elsevier Science Publishers B.V.
conference name
18th International Vacuum Congress, IVC 2010
conference location
Beijing, China
conference dates
2010-08-23 - 2010-08-27
external identifiers
  • scopus:84988032932
ISSN
1875-3884
1875-3892
ISBN
9781627487481
DOI
10.1016/j.phpro.2012.03.644
language
English
LU publication?
no
additional info
Publisher Copyright: © 2012 Published by Elsevier B.V.
id
af3a702e-8cb6-4ea4-9cc8-0262d999afcd
date added to LUP
2025-01-26 11:46:38
date last changed
2025-05-23 10:29:15
@inproceedings{af3a702e-8cb6-4ea4-9cc8-0262d999afcd,
  abstract     = {{<p>Among several methods used to obtain ultra-high vacuum (UHV) for particles accelerators chambers, it stands out the internal coating with metallic films capable of absorbing gases, called NEG (non-evaporable getter). Usually these materials are constituted by elements of great chemical reactivity and solubility (such as Ti, Zr, and V), at room temperature for oxygen and other gases typically found in UHV, such as H<sub>2</sub>, CO, and CO<sub>2</sub>. Gold and ternary Ti-Zr-V films were produced by magnetron sputtering, and their composition, structure, morphology, and aging characteristics were characterized by energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), field emission gun sc anning electronmicroscopy (FEG-SEM), atomic force microscopy (AFM), high resolution transmission electron microscopy (HRTEM). The comparison between the produced films and commercial samples indicated that the desirable characteristics depend on the nanometric structure of the films and that this structure is sensitive to the heat treatments.</p>}},
  author       = {{Ferreira, M. J. and Seraphim, R. M. and Ramirez, A. J. and Tabacniks, M. H. and Nascente, P. A.P.}},
  booktitle    = {{18th International Vacuum Congress, IVC 2010}},
  editor       = {{Pan, Feng and Chen, Xu}},
  isbn         = {{9781627487481}},
  issn         = {{1875-3884}},
  keywords     = {{atomic force microscopy (AFM); high resolution transmission electron microscopy (HRTEM); NEG; thermal treatment; X-ray diffraction (XRD)}},
  language     = {{eng}},
  pages        = {{840--852}},
  publisher    = {{Elsevier Science Publishers B.V.}},
  series       = {{Physics Procedia}},
  title        = {{Characterization and Evaluation of Ti-Zr-V Non-evaporable Getter Films Used in Vacuum Systems}},
  url          = {{http://dx.doi.org/10.1016/j.phpro.2012.03.644}},
  doi          = {{10.1016/j.phpro.2012.03.644}},
  volume       = {{32}},
  year         = {{2012}},
}