Chemically inert microfluidic flow regulator with a glass-Teflon2-glass structure fabricated via facile thermal bonding
(2025) In Sensors and Actuators A: Physical 396.- Abstract
Recent advancements in integrated chemical microsystems have significantly enhanced the efficiency and precision of chemical synthesis. However, limitations in current materials and fabrication technologies pose challenges to developing robust flow regulation essential for system operation and scalability. This study presents a cleanroom-free, surface-modification-free bonding method for fabricating chemically inert microfluidic flow regulators with a glass-Teflon-glass structure. The fabrication process leverages the distinct melting temperatures of commercially available fluorinated ethylene propylene (FEP) and polytetrafluoroethylene (PTFE) films, utilizing their melting point differences to assign FEP as a thermal adhesive layer and... (More)
Recent advancements in integrated chemical microsystems have significantly enhanced the efficiency and precision of chemical synthesis. However, limitations in current materials and fabrication technologies pose challenges to developing robust flow regulation essential for system operation and scalability. This study presents a cleanroom-free, surface-modification-free bonding method for fabricating chemically inert microfluidic flow regulators with a glass-Teflon-glass structure. The fabrication process leverages the distinct melting temperatures of commercially available fluorinated ethylene propylene (FEP) and polytetrafluoroethylene (PTFE) films, utilizing their melting point differences to assign FEP as a thermal adhesive layer and PTFE as a movable diaphragm. The resulting flow regulator employs pneumatic pressure to control the system’s flow rate with linear and hysteresis-free performance. It withstands applied pressures up to 700 kPa—more than an order of magnitude higher than previously reported glass-Teflon valves—and operating temperatures as high as 150°C. Furthermore, the study demonstrates uniform flow distribution within a parallel microfluidic system designed for scalability and successful integration of multiple regulators into microfluidic channels. This practical and cost-effective fabrication method broadens the potential applications of chemically resistant microfluidic devices, particularly in chemical processes that require precise and reliable fluid control.
(Less)
- author
- Shen, Kao Mai ; Morikawa, Kyojiro ; Kitamori, Takehiko LU and Chen, Chihchen
- organization
- publishing date
- 2025-12-16
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- Chemical resistance, Cleanroom-free bonding, Flow regulator, Glass-Teflon bonding, Microfluidic, Microvalve
- in
- Sensors and Actuators A: Physical
- volume
- 396
- article number
- 117220
- publisher
- Elsevier
- external identifiers
-
- scopus:105027200008
- ISSN
- 0924-4247
- DOI
- 10.1016/j.sna.2025.117220
- language
- English
- LU publication?
- yes
- additional info
- Publisher Copyright: © 2025 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license. http://creativecommons.org/licenses/by-nc-nd/4.0/
- id
- b030b46a-a4c3-4f61-bcce-73b7df466bbb
- date added to LUP
- 2026-02-11 13:27:30
- date last changed
- 2026-02-11 13:28:31
@article{b030b46a-a4c3-4f61-bcce-73b7df466bbb,
abstract = {{<p>Recent advancements in integrated chemical microsystems have significantly enhanced the efficiency and precision of chemical synthesis. However, limitations in current materials and fabrication technologies pose challenges to developing robust flow regulation essential for system operation and scalability. This study presents a cleanroom-free, surface-modification-free bonding method for fabricating chemically inert microfluidic flow regulators with a glass-Teflon-glass structure. The fabrication process leverages the distinct melting temperatures of commercially available fluorinated ethylene propylene (FEP) and polytetrafluoroethylene (PTFE) films, utilizing their melting point differences to assign FEP as a thermal adhesive layer and PTFE as a movable diaphragm. The resulting flow regulator employs pneumatic pressure to control the system’s flow rate with linear and hysteresis-free performance. It withstands applied pressures up to 700 kPa—more than an order of magnitude higher than previously reported glass-Teflon valves—and operating temperatures as high as 150°C. Furthermore, the study demonstrates uniform flow distribution within a parallel microfluidic system designed for scalability and successful integration of multiple regulators into microfluidic channels. This practical and cost-effective fabrication method broadens the potential applications of chemically resistant microfluidic devices, particularly in chemical processes that require precise and reliable fluid control.</p>}},
author = {{Shen, Kao Mai and Morikawa, Kyojiro and Kitamori, Takehiko and Chen, Chihchen}},
issn = {{0924-4247}},
keywords = {{Chemical resistance; Cleanroom-free bonding; Flow regulator; Glass-Teflon bonding; Microfluidic; Microvalve}},
language = {{eng}},
month = {{12}},
publisher = {{Elsevier}},
series = {{Sensors and Actuators A: Physical}},
title = {{Chemically inert microfluidic flow regulator with a glass-Teflon<sup>2</sup>-glass structure fabricated via facile thermal bonding}},
url = {{http://dx.doi.org/10.1016/j.sna.2025.117220}},
doi = {{10.1016/j.sna.2025.117220}},
volume = {{396}},
year = {{2025}},
}