Rapid scalable plasma processing of thin-film Li–La–Zr–O solid-state electrolytes
(2025) In Matter 8(11).- Abstract
Solid-state electrolytes, such as lithium lanthanum zirconium oxide (LLZO), show promise as technologies for next-generation high-energy-density batteries, but commercial development has been hindered by a lack of scalable processing methods. Current fabrication methods are costly or require long annealing steps to create dense films. We report an atmospheric pressure blown-arc nitrogen plasma jet process to rapidly form sub-micrometer-thick, dense amorphous LLZO (a-LLZO) films from sol-gel precursors. Films are processed in less than 2 min, an order of magnitude faster than what has previously been reported. We demonstrate 500-nm-thick a-LLZO films processed at 350°C with an ionic conductivity of 2 × 10−6 S/cm at 30°C and 2... (More)
Solid-state electrolytes, such as lithium lanthanum zirconium oxide (LLZO), show promise as technologies for next-generation high-energy-density batteries, but commercial development has been hindered by a lack of scalable processing methods. Current fabrication methods are costly or require long annealing steps to create dense films. We report an atmospheric pressure blown-arc nitrogen plasma jet process to rapidly form sub-micrometer-thick, dense amorphous LLZO (a-LLZO) films from sol-gel precursors. Films are processed in less than 2 min, an order of magnitude faster than what has previously been reported. We demonstrate 500-nm-thick a-LLZO films processed at 350°C with an ionic conductivity of 2 × 10−6 S/cm at 30°C and 2 × 10−3 S/cm at 100°C and a conductance of 19 S at 100°C, the highest conductance of any LLZO phase to date. The films exhibit outstanding smooth surface morphology with low defectivity, advancing atmospheric plasma processing as a scalable processing method for solid-state electrolytes.
(Less)
- author
- Crane, Gabriel Badillo
; Colburn, Thomas W.
; Holmes, Sarah E.
; Just, Justus
LU
; Cui, Yi
and Dauskardt, Reinhold H.
- organization
- publishing date
- 2025-11
- type
- Contribution to journal
- publication status
- published
- subject
- keywords
- a-LLZO, amorphous electrolytes, EXAFS, LLZO, plasma curing, scalable manufacturing, separator films, solid-state batteries, thin film, XANES
- in
- Matter
- volume
- 8
- issue
- 11
- article number
- 102468
- publisher
- Cell Press
- external identifiers
-
- scopus:105017613038
- ISSN
- 2590-2393
- DOI
- 10.1016/j.matt.2025.102468
- language
- English
- LU publication?
- yes
- id
- b76df33a-f2c9-42d5-8db7-7210c3595b82
- date added to LUP
- 2025-12-08 11:41:54
- date last changed
- 2025-12-08 11:42:47
@article{b76df33a-f2c9-42d5-8db7-7210c3595b82,
abstract = {{<p>Solid-state electrolytes, such as lithium lanthanum zirconium oxide (LLZO), show promise as technologies for next-generation high-energy-density batteries, but commercial development has been hindered by a lack of scalable processing methods. Current fabrication methods are costly or require long annealing steps to create dense films. We report an atmospheric pressure blown-arc nitrogen plasma jet process to rapidly form sub-micrometer-thick, dense amorphous LLZO (a-LLZO) films from sol-gel precursors. Films are processed in less than 2 min, an order of magnitude faster than what has previously been reported. We demonstrate 500-nm-thick a-LLZO films processed at 350°C with an ionic conductivity of 2 × 10<sup>−6</sup> S/cm at 30°C and 2 × 10<sup>−3</sup> S/cm at 100°C and a conductance of 19 S at 100°C, the highest conductance of any LLZO phase to date. The films exhibit outstanding smooth surface morphology with low defectivity, advancing atmospheric plasma processing as a scalable processing method for solid-state electrolytes.</p>}},
author = {{Crane, Gabriel Badillo and Colburn, Thomas W. and Holmes, Sarah E. and Just, Justus and Cui, Yi and Dauskardt, Reinhold H.}},
issn = {{2590-2393}},
keywords = {{a-LLZO; amorphous electrolytes; EXAFS; LLZO; plasma curing; scalable manufacturing; separator films; solid-state batteries; thin film; XANES}},
language = {{eng}},
number = {{11}},
publisher = {{Cell Press}},
series = {{Matter}},
title = {{Rapid scalable plasma processing of thin-film Li–La–Zr–O solid-state electrolytes}},
url = {{http://dx.doi.org/10.1016/j.matt.2025.102468}},
doi = {{10.1016/j.matt.2025.102468}},
volume = {{8}},
year = {{2025}},
}