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Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Mota-Santiago, P. LU ; Vazquez, H. ; Bierschenk, T. ; Kremer, F. ; Nadzri, A. ; Schauries, D. ; Djurabekova, F. ; Nordlund, K. ; Trautmann, C. and Mudie, S. , et al. (2018) In Nanotechnology 29(14).
Abstract

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiNx:H and SiOx:H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiNx:H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiOx:H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to... (More)

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiNx:H and SiOx:H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiNx:H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiOx:H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

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publishing date
type
Contribution to journal
publication status
published
subject
in
Nanotechnology
volume
29
issue
14
article number
144004
pages
13 pages
publisher
IOP Publishing
external identifiers
  • pmid:29384134
  • scopus:85042281974
ISSN
0957-4484
DOI
10.1088/1361-6528/aaabdb
language
English
LU publication?
no
additional info
Publisher Copyright: © 2018 IOP Publishing Ltd.
id
b7a0a131-b7ff-40c5-a2b0-108a8c9a3110
date added to LUP
2023-04-05 16:20:17
date last changed
2024-07-12 21:23:38
@article{b7a0a131-b7ff-40c5-a2b0-108a8c9a3110,
  abstract     = {{<p>The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN<sub>x</sub>:H and SiO<sub>x</sub>:H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN<sub>x</sub>:H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO<sub>x</sub>:H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.</p>}},
  author       = {{Mota-Santiago, P. and Vazquez, H. and Bierschenk, T. and Kremer, F. and Nadzri, A. and Schauries, D. and Djurabekova, F. and Nordlund, K. and Trautmann, C. and Mudie, S. and Ridgway, M. C. and Kluth, P.}},
  issn         = {{0957-4484}},
  language     = {{eng}},
  month        = {{02}},
  number       = {{14}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide}},
  url          = {{http://dx.doi.org/10.1088/1361-6528/aaabdb}},
  doi          = {{10.1088/1361-6528/aaabdb}},
  volume       = {{29}},
  year         = {{2018}},
}