Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au
(2004) 30th International conference on Micro and Nano Engineering (MNE 2004) p.214-215
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3351335
- author
- Tenje, Maria LU ; Johansson, A. ; Sánchez-Noguerón, E. ; Clausen, B. ; Calleja, M. and Boisen, A.
- publishing date
- 2004
- type
- Contribution to conference
- publication status
- published
- subject
- pages
- 214 - 215
- conference name
- 30th International conference on Micro and Nano Engineering (MNE 2004)
- conference location
- Netherlands
- conference dates
- 2004-09-19 - 2004-09-22
- language
- English
- LU publication?
- no
- id
- ce4d9c8c-bbd7-4e5c-8a9a-743c4884dd08 (old id 3351335)
- date added to LUP
- 2016-04-04 13:29:09
- date last changed
- 2018-11-21 21:14:17
@misc{ce4d9c8c-bbd7-4e5c-8a9a-743c4884dd08,
author = {{Tenje, Maria and Johansson, A. and Sánchez-Noguerón, E. and Clausen, B. and Calleja, M. and Boisen, A.}},
language = {{eng}},
pages = {{214--215}},
title = {{Investigation of the bond strength between the photo-sensitive polymer SU-8 and Au}},
year = {{2004}},
}