Sloped side walls in SU-8 structures with ‘Step and Flash’
(2005) 31st International Conference on Micro and Nano Engineering (MNE 2005)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3290191
- author
- Tenje, Maria LU ; Hübner, J. and Boisen, A.
- publishing date
- 2005
- type
- Contribution to conference
- publication status
- published
- subject
- conference name
- 31st International Conference on Micro and Nano Engineering (MNE 2005)
- conference location
- Vienna, Austria
- conference dates
- 2005-09-19 - 2005-09-22
- language
- English
- LU publication?
- no
- id
- e6b026e2-3adc-440e-bccf-c7b6986507c8 (old id 3290191)
- date added to LUP
- 2016-04-04 14:42:13
- date last changed
- 2018-11-21 21:22:13
@misc{e6b026e2-3adc-440e-bccf-c7b6986507c8,
author = {{Tenje, Maria and Hübner, J. and Boisen, A.}},
language = {{eng}},
title = {{Sloped side walls in SU-8 structures with ‘Step and Flash’}},
year = {{2005}},
}