Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines
(2020) In Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 38(2).- Abstract
In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.
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https://lup.lub.lu.se/record/e81936d0-38d6-4087-a985-da4aa45483fc
- author
- publishing date
- 2020-03-01
- type
- Contribution to journal
- publication status
- published
- in
- Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
- volume
- 38
- issue
- 2
- article number
- 024005-1
- publisher
- AVS Science and Technology Society
- external identifiers
-
- scopus:85081098365
- ISSN
- 2166-2746
- DOI
- 10.1116/1.5129674
- language
- English
- LU publication?
- no
- additional info
- Publisher Copyright: © 2020 Author(s).
- id
- e81936d0-38d6-4087-a985-da4aa45483fc
- date added to LUP
- 2022-04-19 14:44:19
- date last changed
- 2022-04-27 04:54:13
@article{e81936d0-38d6-4087-a985-da4aa45483fc, abstract = {{<p>In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.</p>}}, author = {{Espinoza, Shirly and Samparisi, Fabio and Frassetto, Fabio and Richter, Steffen and Rebarz, Mateusz and Finke, Ondrej and Albrecht, Martin and Jurkovic, Matej and Hort, Ondrej and Fabris, Nicola and Zymaková, Anna and Mai, Dong Du and Antipenkov, Roman and Nejdl, Jaroslav and Poletto, Luca and Andreasson, Jakob}}, issn = {{2166-2746}}, language = {{eng}}, month = {{03}}, number = {{2}}, publisher = {{AVS Science and Technology Society}}, series = {{Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}}, title = {{Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines}}, url = {{http://dx.doi.org/10.1116/1.5129674}}, doi = {{10.1116/1.5129674}}, volume = {{38}}, year = {{2020}}, }