Skip to main content

Lund University Publications

LUND UNIVERSITY LIBRARIES

Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines

Espinoza, Shirly ; Samparisi, Fabio ; Frassetto, Fabio ; Richter, Steffen LU ; Rebarz, Mateusz ; Finke, Ondrej ; Albrecht, Martin ; Jurkovic, Matej ; Hort, Ondrej and Fabris, Nicola , et al. (2020) In Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 38(2).
Abstract

In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.

Please use this url to cite or link to this publication:
author
; ; ; ; ; ; ; ; and , et al. (More)
; ; ; ; ; ; ; ; ; ; ; ; ; ; and (Less)
publishing date
type
Contribution to journal
publication status
published
in
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
volume
38
issue
2
article number
024005-1
publisher
AVS Science and Technology Society
external identifiers
  • scopus:85081098365
ISSN
2166-2746
DOI
10.1116/1.5129674
language
English
LU publication?
no
additional info
Publisher Copyright: © 2020 Author(s).
id
e81936d0-38d6-4087-a985-da4aa45483fc
date added to LUP
2022-04-19 14:44:19
date last changed
2022-04-27 04:54:13
@article{e81936d0-38d6-4087-a985-da4aa45483fc,
  abstract     = {{<p>In this paper, the authors present the characterization experiments of a 20 fs vacuum ultraviolet beam from a high harmonic generation source. The beam hits a silicon sample and passes a triple reflection gold polarizer located inside an ultrahigh vacuum chamber. The polarizer's Malus curve was obtained; the total acquisition time for each point of the curve was 30 s. This aims to be the first vacuum ultraviolet time-resolved user station dedicated to ellipsometry. The high harmonic beam is generated by a 12 mJ, 1 kHz, 20 fs, in-house-developed laser and detected by a back-illuminated charge-coupled device.</p>}},
  author       = {{Espinoza, Shirly and Samparisi, Fabio and Frassetto, Fabio and Richter, Steffen and Rebarz, Mateusz and Finke, Ondrej and Albrecht, Martin and Jurkovic, Matej and Hort, Ondrej and Fabris, Nicola and Zymaková, Anna and Mai, Dong Du and Antipenkov, Roman and Nejdl, Jaroslav and Poletto, Luca and Andreasson, Jakob}},
  issn         = {{2166-2746}},
  language     = {{eng}},
  month        = {{03}},
  number       = {{2}},
  publisher    = {{AVS Science and Technology Society}},
  series       = {{Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics}},
  title        = {{Characterization of the high harmonics source for the VUV ellipsometer at ELI Beamlines}},
  url          = {{http://dx.doi.org/10.1116/1.5129674}},
  doi          = {{10.1116/1.5129674}},
  volume       = {{38}},
  year         = {{2020}},
}