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Nanoimprint-based fabrication and characterization of interdigitated cantilevver array

Luo, Gang LU ; Ghatnekar-Nilsson, Sara LU ; Maximov, Ivan LU ; Graczyk, Mariusz LU ; Carlberg, Patrick LU ; Adolph, David LU ; Hessman, Dan LU ; Zhu, T ; Liu, Z and Xu, Hongqi LU , et al. (2006) International Conference on Nanoscience and Technology, 2006
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author
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organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
host publication
Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006)
conference name
International Conference on Nanoscience and Technology, 2006
conference location
Basel, Switzerland
conference dates
2006-07-30 - 2006-08-04
language
English
LU publication?
yes
id
f1eb5761-9ec7-48f5-b249-227a5e22d5a3 (old id 963102)
date added to LUP
2016-04-04 13:26:59
date last changed
2018-11-21 21:14:03
@inproceedings{f1eb5761-9ec7-48f5-b249-227a5e22d5a3,
  author       = {{Luo, Gang and Ghatnekar-Nilsson, Sara and Maximov, Ivan and Graczyk, Mariusz and Carlberg, Patrick and Adolph, David and Hessman, Dan and Zhu, T and Liu, Z and Xu, Hongqi and Montelius, Lars}},
  booktitle    = {{Book of abstracts: Intl Conf on Nanosci and Technol, Basel, Switzerland (2006)}},
  language     = {{eng}},
  title        = {{Nanoimprint-based fabrication and characterization of interdigitated cantilevver array}},
  year         = {{2006}},
}