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2023
Mark Carbon nanotube membranes for EUV photolithography-a versatile material platform
Etula, Jarkko ; Soliman, Ahmed ; Ghosh, Tuhin ; Mikladal, Bjørn ; Salmi, Emma ; Van Veldhoven, Emile ; Chernenko, Kirill ^LU ; Varjos, Ilkka and Juntunen, Taneli (2023) International Conference on Extreme Ultraviolet Lithography 2023
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding