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2002
Mark Threshold stoichiometry for beam induced nitrogen depletion of SiN
Timmers, H ; Weijers, TDM ; Elliman, RG ; Uribasterra, J ; Whitlow, Harry J ^LU and Sarwe, Eva-Lena ^LU (2002) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 190. p.428-432
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