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2006
Mark Exposure parameters for MeV proton beam writing on SU-8
Auzelyte, Vaida ^LU ; Elfman, Mikael ^LU ; Kristiansson, Per ^LU ; Nilsson, Christer ^LU ; Pallon, Jan ^LU ; Arteaga, Natalia ^LU and Wegdén, Marie ^LU (2006) In Microelectronic Engineering 83(10). p.2015-2020
- Contribution to journal › Article