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2004
Mark The beam blanking system for microlithography at Lund Nuclear microprobe
Auzelyte, Vaida ^LU ; Elfman, Mikael ^LU ; Kristiansson, Per ^LU ; Malmqvist, Klas ^LU ; Wallman, Lars ^LU ; Nilsson, Christer ^LU ; Pallon, Jan ^LU ; Shariff, Asad ^LU and Wegdén, Marie ^LU (2004) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 219-20. p.485-489
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