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2006
Mark Exposure parameters for MeV proton beam writing on SU-8
Auzelyte, Vaida ^LU ; Elfman, Mikael ^LU ; Kristiansson, Per ^LU ; Nilsson, Christer ^LU ; Pallon, Jan ^LU ; Arteaga, Natalia ^LU and Wegdén, Marie ^LU (2006) In Microelectronic Engineering 83(10). p.2015-2020
- Contribution to journal › Article
Mark Fabrication of phosphor micro-grids using proton beam lithography
Auzelyte, Vaida ^LU ; Elfman, Mikael ^LU ; Kristiansson, Per ^LU ; Pallon, Jan ^LU ; Wegdén, Marie ^LU ; Nilsson, Christer ^LU ; Malmqvist, Klas ^LU ; Doyle, BL ; Rossi, P and Hearne, SJ , et al. (2006) In Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms 242(1-2). p.253-256
- Contribution to journal › Article