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2002
Mark Quantative photoelectron spectromicroscopy for investigation of PMMA resist residues
Zakharov, Alexei ^LU ; Maximov, Ivan ^LU ; Holmqvist, T. ; Montelius, Lars ^LU and Lindau, Ingolf ^LU (2002) Proceedings of 7th International Conference on Nanometer-Scale Science and Technology and 21st European Conference on Surface Science (NANO-7/ECOSS-21)
- Chapter in Book/Report/Conference proceeding › Paper in conference proceeding