A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides
(2008) In Journal of Micromechanics and Microengineering 18(1).- Abstract
- We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.
Novel fabrication technique for free-hanging homogeneous... (More) - We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.
Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3130370
- author
- Tenje, Maria LU ; Calleja, Montserrat ; Hübner, Jörg and Boisen, Anja
- publishing date
- 2008
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Journal of Micromechanics and Microengineering
- volume
- 18
- issue
- 1
- publisher
- IOP Publishing
- external identifiers
-
- scopus:41849151428
- ISSN
- 0960-1317
- DOI
- 10.1088/0960-1317/18/1/015017
- language
- English
- LU publication?
- no
- id
- d47e8aa0-5991-4175-ab1c-30247f20c7d3 (old id 3130370)
- date added to LUP
- 2016-04-04 09:16:47
- date last changed
- 2022-01-29 17:06:13
@article{d47e8aa0-5991-4175-ab1c-30247f20c7d3,
abstract = {{We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.<br/><br>
Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides}},
author = {{Tenje, Maria and Calleja, Montserrat and Hübner, Jörg and Boisen, Anja}},
issn = {{0960-1317}},
language = {{eng}},
number = {{1}},
publisher = {{IOP Publishing}},
series = {{Journal of Micromechanics and Microengineering}},
title = {{A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides}},
url = {{http://dx.doi.org/10.1088/0960-1317/18/1/015017}},
doi = {{10.1088/0960-1317/18/1/015017}},
volume = {{18}},
year = {{2008}},
}