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Dense high aspect ratio pillar arrays for carbon MEMS devices

Amato, L. ; Hansen, R.J. ; Heiskanen, A. ; Gammelgard, L. ; Rindzevicius, T. ; Martinez-Duarte, R. ; Bisht, G.S. ; Baronian, K. ; Downard, A. and Tenje, Maria LU , et al. (2012) 38th International Conference on Micro and Nano Engineering (MNE 2012)
Abstract
This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.
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publishing date
type
Contribution to conference
publication status
published
subject
conference name
38th International Conference on Micro and Nano Engineering (MNE 2012)
conference location
Toulouse, France
conference dates
2012-09-16 - 2012-09-20
language
English
LU publication?
no
additional info
The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Analytical Chemistry (S/LTH) (011001004), Biomedical Engineering (011200011)
id
5a4be5b9-193d-4571-b527-ce2fb5df7ff6 (old id 3173496)
date added to LUP
2016-04-04 12:56:33
date last changed
2018-11-21 21:11:28
@misc{5a4be5b9-193d-4571-b527-ce2fb5df7ff6,
  abstract     = {{This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.}},
  author       = {{Amato, L. and Hansen, R.J. and Heiskanen, A. and Gammelgard, L. and Rindzevicius, T. and Martinez-Duarte, R. and Bisht, G.S. and Baronian, K. and Downard, A. and Tenje, Maria and Madou, M. and Boisen, A. and Emnéus, Jenny and Keller, S.S.}},
  language     = {{eng}},
  title        = {{Dense high aspect ratio pillar arrays for carbon MEMS devices}},
  year         = {{2012}},
}