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Electrical and optical evaluation of n-type doping in InxGa(1-x)P nanowires

Zeng, Xulu LU ; Mourao, Renato T. ; Otnes, Gaute LU ; Hultin, Olof LU ; Dagyte, Vilgaile LU ; Heurlin, Magnus LU and Borgström, Magnus T. LU (2018) In Nanotechnology 29(25).
Abstract

To harvest the benefits of III-V nanowires in optoelectronic devices, the development of ternary materials with controlled doping is needed. In this work, we performed a systematic study of n-type dopant incorporation in dense InxGa(1-x)P nanowire arrays using tetraethyl tin (TESn) and hydrogen sulfide (H2S) as dopant precursors. The morphology, crystal structure and material composition of the nanowires were characterized by use of scanning electron microscopy, transmission electron microscopy and energy dispersive x-ray analysis. To investigate the electrical properties, the nanowires were broken off from the substrate and mechanically transferred to thermally oxidized silicon substrates, after which... (More)

To harvest the benefits of III-V nanowires in optoelectronic devices, the development of ternary materials with controlled doping is needed. In this work, we performed a systematic study of n-type dopant incorporation in dense InxGa(1-x)P nanowire arrays using tetraethyl tin (TESn) and hydrogen sulfide (H2S) as dopant precursors. The morphology, crystal structure and material composition of the nanowires were characterized by use of scanning electron microscopy, transmission electron microscopy and energy dispersive x-ray analysis. To investigate the electrical properties, the nanowires were broken off from the substrate and mechanically transferred to thermally oxidized silicon substrates, after which electron beam lithography and metal evaporation were used to define electrical contacts to selected nanowires. Electrical characterization, including four-probe resistivity and Hall effect, as well as back-gated field effect measurements, is combined with photoluminescence spectroscopy to achieve a comprehensive evaluation of the carrier concentration in the doped nanowires. We measure a carrier concentration of ∼1 ×1016 cm-3 in nominally intrinsic nanowires, and the maximum doping level achieved by use of TESn and H2S as dopant precursors using our parameters is measured to be ∼2 ×1018 cm-3, and ∼1 ×1019 cm-3, respectively (by Hall effect measurements). Hence, both TESn and H2S are suitable precursors for a wide range of n-doping levels in InxGa(1-x)P nanowires needed for optoelectronic devices, grown via the vapor-liquid-solid mode.

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author
; ; ; ; ; and
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
doping, evaluation, InGaP, nanowire
in
Nanotechnology
volume
29
issue
25
article number
255701
publisher
IOP Publishing
external identifiers
  • pmid:29595525
  • scopus:85046440900
ISSN
0957-4484
DOI
10.1088/1361-6528/aabaa5
language
English
LU publication?
yes
id
826b66e6-baa0-4abd-a1da-7ad4ae591af8
date added to LUP
2018-05-18 13:30:22
date last changed
2024-01-29 16:06:06
@article{826b66e6-baa0-4abd-a1da-7ad4ae591af8,
  abstract     = {{<p>To harvest the benefits of III-V nanowires in optoelectronic devices, the development of ternary materials with controlled doping is needed. In this work, we performed a systematic study of n-type dopant incorporation in dense In<sub>x</sub>Ga<sub>(1-x)</sub>P nanowire arrays using tetraethyl tin (TESn) and hydrogen sulfide (H<sub>2</sub>S) as dopant precursors. The morphology, crystal structure and material composition of the nanowires were characterized by use of scanning electron microscopy, transmission electron microscopy and energy dispersive x-ray analysis. To investigate the electrical properties, the nanowires were broken off from the substrate and mechanically transferred to thermally oxidized silicon substrates, after which electron beam lithography and metal evaporation were used to define electrical contacts to selected nanowires. Electrical characterization, including four-probe resistivity and Hall effect, as well as back-gated field effect measurements, is combined with photoluminescence spectroscopy to achieve a comprehensive evaluation of the carrier concentration in the doped nanowires. We measure a carrier concentration of ∼1 ×10<sup>16</sup> cm<sup>-3</sup> in nominally intrinsic nanowires, and the maximum doping level achieved by use of TESn and H<sub>2</sub>S as dopant precursors using our parameters is measured to be ∼2 ×10<sup>18</sup> cm<sup>-3</sup>, and ∼1 ×10<sup>19</sup> cm<sup>-3</sup>, respectively (by Hall effect measurements). Hence, both TESn and H<sub>2</sub>S are suitable precursors for a wide range of n-doping levels in In<sub>x</sub>Ga<sub>(1-x)</sub>P nanowires needed for optoelectronic devices, grown via the vapor-liquid-solid mode.</p>}},
  author       = {{Zeng, Xulu and Mourao, Renato T. and Otnes, Gaute and Hultin, Olof and Dagyte, Vilgaile and Heurlin, Magnus and Borgström, Magnus T.}},
  issn         = {{0957-4484}},
  keywords     = {{doping; evaluation; InGaP; nanowire}},
  language     = {{eng}},
  month        = {{04}},
  number       = {{25}},
  publisher    = {{IOP Publishing}},
  series       = {{Nanotechnology}},
  title        = {{Electrical and optical evaluation of n-type doping in In<sub>x</sub>Ga<sub>(1-x)</sub>P nanowires}},
  url          = {{https://lup.lub.lu.se/search/files/70716533/Post_print_author_manuscript_Electrical_and_optical_evaluation_of_n_type_doping.pdf}},
  doi          = {{10.1088/1361-6528/aabaa5}},
  volume       = {{29}},
  year         = {{2018}},
}