Dry release of suspended nanostructures
(2004) Micro Nano Engin, 2003
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/962298
- author
- Forsén, E ; Davis, Z J ; Dong, M ; Nilsson, S G ; Montelius, Lars LU and Boisen, A
- organization
- publishing date
- 2004
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- host publication
- Microelectr Engin 73-74, 487-490 (2004)
- conference name
- Micro Nano Engin, 2003
- conference location
- Cambridge, United Kingdom
- conference dates
- 0001-01-02
- external identifiers
-
- scopus:2542429756
- language
- English
- LU publication?
- yes
- id
- 3fa0b0d1-bbf1-489c-a662-e2f6715627c1 (old id 962298)
- date added to LUP
- 2016-04-04 13:43:41
- date last changed
- 2022-03-16 02:11:18
@inproceedings{3fa0b0d1-bbf1-489c-a662-e2f6715627c1,
author = {{Forsén, E and Davis, Z J and Dong, M and Nilsson, S G and Montelius, Lars and Boisen, A}},
booktitle = {{Microelectr Engin 73-74, 487-490 (2004)}},
language = {{eng}},
title = {{Dry release of suspended nanostructures}},
year = {{2004}},
}