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Design and Modeling of a High-Speed AFM-Scanner

Schitter, Georg; Åström, Karl Johan LU ; DeMartini, Barry E.; Thurner, Philipp J.; Turner, Kimberly L. and Hansma, Paul K. (2007) In IEEE Transactions on Control Systems Technology 15(5). p.906-915
Abstract
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new... (More)
A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s. (Less)
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author
organization
publishing date
type
Contribution to journal
publication status
published
subject
keywords
Atomic force microscopy, fast scanning, mechatronics, nanotechnology, precision positioning, real time imaging
in
IEEE Transactions on Control Systems Technology
volume
15
issue
5
pages
906 - 915
publisher
IEEE--Institute of Electrical and Electronics Engineers Inc.
external identifiers
  • Scopus:38849136027
ISSN
1558-0865
DOI
10.1109/TCST.2007.902953
language
English
LU publication?
yes
id
4d962b0a-79eb-463c-bd92-1ca3dc893bc3 (old id 3049577)
date added to LUP
2012-09-05 10:51:49
date last changed
2016-12-04 04:49:36
@misc{4d962b0a-79eb-463c-bd92-1ca3dc893bc3,
  abstract     = {A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial axis of motion with the highest precision and bandwidth requirements for gentle imaging with the AFM. A second- and a fourth-order mathematical model of the scanner are derived that allow new insights into important design parameters. Proportional-integral (Pl)-feedback control of the high-speed scanner is discussed and the performance of the new AFM is demonstrated by imaging a calibration grating and a biological sample at 8 frames/s.},
  author       = {Schitter, Georg and Åström, Karl Johan and DeMartini, Barry E. and Thurner, Philipp J. and Turner, Kimberly L. and Hansma, Paul K.},
  issn         = {1558-0865},
  keyword      = {Atomic force microscopy,fast scanning,mechatronics,nanotechnology,precision positioning,real time imaging},
  language     = {eng},
  number       = {5},
  pages        = {906--915},
  publisher    = {ARRAY(0xb3a22b0)},
  series       = {IEEE Transactions on Control Systems Technology},
  title        = {Design and Modeling of a High-Speed AFM-Scanner},
  url          = {http://dx.doi.org/10.1109/TCST.2007.902953},
  volume       = {15},
  year         = {2007},
}