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A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides

Tenje, Maria LU ; Calleja, Montserrat; Hübner, Jörg and Boisen, Anja (2008) In Journal of Micromechanics and Microengineering 18(1).
Abstract
We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.

Novel fabrication technique for free-hanging homogeneous... (More)
We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.

Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides (Less)
Please use this url to cite or link to this publication:
author
publishing date
type
Contribution to journal
publication status
published
subject
in
Journal of Micromechanics and Microengineering
volume
18
issue
1
publisher
IOP Publishing
external identifiers
  • Scopus:41849151428
ISSN
0960-1317
DOI
10.1088/0960-1317/18/1/015017
language
English
LU publication?
no
id
d47e8aa0-5991-4175-ab1c-30247f20c7d3 (old id 3130370)
date added to LUP
2012-10-17 14:55:50
date last changed
2016-10-13 04:27:29
@misc{d47e8aa0-5991-4175-ab1c-30247f20c7d3,
  abstract     = {We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.<br/><br>
Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides},
  author       = {Tenje, Maria and Calleja, Montserrat and Hübner, Jörg and Boisen, Anja},
  issn         = {0960-1317},
  language     = {eng},
  number       = {1},
  publisher    = {ARRAY(0xa2bba38)},
  series       = {Journal of Micromechanics and Microengineering},
  title        = {A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides},
  url          = {http://dx.doi.org/10.1088/0960-1317/18/1/015017},
  volume       = {18},
  year         = {2008},
}