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Highly sensitive polymer-based cantilever-sensors for DNA detection

Calleja, Montserrat; Tenje, Maria LU ; Alvarez, M. and Tamayo, J. (2005) In Ultramicroscopy 105(1/4). p.215-222
Abstract
We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent... (More)
We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers. (Less)
Please use this url to cite or link to this publication:
author
publishing date
type
Contribution to journal
publication status
published
subject
in
Ultramicroscopy
volume
105
issue
1/4
pages
215 - 222
publisher
Elsevier
external identifiers
  • Scopus:27544435132
ISSN
0304-3991
DOI
10.1016/j.ultramic.2005.06.039
language
English
LU publication?
no
id
deb25fcf-c66c-4313-962c-69059dc9947b (old id 3157990)
date added to LUP
2012-10-25 17:20:06
date last changed
2016-11-20 04:22:28
@misc{deb25fcf-c66c-4313-962c-69059dc9947b,
  abstract     = {We present a technology for the fabrication of cantilever arrays aimed to develop an integrated biosensor microsystem. The fabrication process is based on spin coating of the photosensitive polymer and near-ultraviolet exposure. Arrays of up to 33 microcantilevers are fabricated in the novel polymer material SU-8. The low Young's modulus of the polymer, 40 times lower than that of silicon, enables to improve the sensitivity of the sensor device for target detection. The mechanical properties of SU-8 cantilevers, such as spring constant, resonant frequency and quality factor are characterized as a function of the dimensions and the medium. The devices have been tested for measurement of the adsorption of single stranded DNA and subsequent interstitial adsorption of lateral spacer molecules. We demonstrate that sensitivity is enhanced by a factor of six compared to that of commercial silicon nitride cantilevers.},
  author       = {Calleja, Montserrat and Tenje, Maria and Alvarez, M. and Tamayo, J.},
  issn         = {0304-3991},
  language     = {eng},
  number       = {1/4},
  pages        = {215--222},
  publisher    = {ARRAY(0x874bbc0)},
  series       = {Ultramicroscopy},
  title        = {Highly sensitive polymer-based cantilever-sensors for DNA detection},
  url          = {http://dx.doi.org/10.1016/j.ultramic.2005.06.039},
  volume       = {105},
  year         = {2005},
}