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Cantilever-based sensor with integrated optical read-out using single mode waveguides

Tenje, Maria LU ; Zauner, D.A. ; Calleja, M. ; Hübner, J. and Boisen, Anja (2007) 11th International Conference on Miniaturised Systems for Chemistry and Life Sciences (µTAS 2007) p.497-499
Abstract
This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication of the system and characterisation of the read-out method.
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author
; ; ; and
publishing date
type
Contribution to conference
publication status
published
subject
pages
497 - 499
conference name
11th International Conference on Miniaturised Systems for Chemistry and Life Sciences (µTAS 2007)
conference location
Paris, France
conference dates
2007-10-07 - 2007-10-11
external identifiers
  • scopus:84925698137
language
English
LU publication?
no
id
fdd5f166-5ab6-46cf-a3f9-2d405a684de2 (old id 3164933)
date added to LUP
2016-04-04 14:08:05
date last changed
2022-03-23 21:11:51
@misc{fdd5f166-5ab6-46cf-a3f9-2d405a684de2,
  abstract     = {{This work presents the design, fabrication and mechanical characterisation of an integrated optical read-out scheme for cantilever-based biosensors. A cantilever can be used as a biosensor by monitoring its bending caused by the surface stress generated due to chemical reactions occurring on its surface. Here, we present a novel integrated optical read-out scheme based on single-mode waveguides that enables the fabrication of a compact system. The complete system is fabricated in the polymer SU-8. This manuscript shows the principle of operation and the design well as the fabrication of the system and characterisation of the read-out method.}},
  author       = {{Tenje, Maria and Zauner, D.A. and Calleja, M. and Hübner, J. and Boisen, Anja}},
  language     = {{eng}},
  pages        = {{497--499}},
  title        = {{Cantilever-based sensor with integrated optical read-out using single mode waveguides}},
  year         = {{2007}},
}