Dense high aspect ratio pillar arrays for carbon MEMS devices
(2012) 38th International Conference on Micro and Nano Engineering (MNE 2012)- Abstract
- This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/3173496
- author
- publishing date
- 2012
- type
- Contribution to conference
- publication status
- published
- subject
- conference name
- 38th International Conference on Micro and Nano Engineering (MNE 2012)
- conference location
- Toulouse, France
- conference dates
- 2012-09-16 - 2012-09-20
- language
- English
- LU publication?
- no
- additional info
- The information about affiliations in this record was updated in December 2015. The record was previously connected to the following departments: Analytical Chemistry (S/LTH) (011001004), Biomedical Engineering (011200011)
- id
- 5a4be5b9-193d-4571-b527-ce2fb5df7ff6 (old id 3173496)
- date added to LUP
- 2016-04-04 12:56:33
- date last changed
- 2024-07-02 13:21:08
@misc{5a4be5b9-193d-4571-b527-ce2fb5df7ff6, abstract = {{This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.}}, author = {{Amato, L. and Hansen, R.J. and Heiskanen, A. and Gammelgard, L. and Rindzevicius, T. and Martinez-Duarte, R. and Bisht, G.S. and Baronian, K. and Downard, A. and Tenje, Maria and Madou, M. and Boisen, A. and Emnéus, Jenny and Keller, S.S.}}, language = {{eng}}, title = {{Dense high aspect ratio pillar arrays for carbon MEMS devices}}, year = {{2012}}, }