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Dense high aspect ratio pillar arrays for carbon MEMS devices

Amato, L.; Hansen, R.J.; Heiskanen, A.; Gammelgard, L.; Rindzevicius, T.; Martinez-Duarte, R.; Bisht, G.S.; Baronian, K.; Downard, A. and Tenje, Maria LU , et al. (2012) 38th International Conference on Micro and Nano Engineering (MNE 2012)
Abstract
This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.
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38th International Conference on Micro and Nano Engineering (MNE 2012)
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English
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5a4be5b9-193d-4571-b527-ce2fb5df7ff6 (old id 3173496)
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2012-11-20 14:58:15
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@misc{5a4be5b9-193d-4571-b527-ce2fb5df7ff6,
  abstract     = {This work presents the fabrication and characterization of 3 dimensional electrodes from pyrolysed carbon with spacing and diameter approaching the resolution limit of standard UV photolithography. Our carbon pillar arrays have a diameter of 1.4 µm, spacing of 5 µm and aspect ratio of about 8. We show their characterization by a variety of techniques providing a complete summary of their electro-mechanical properties (Scanning Electron Microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, cyclic voltammetry, electrical measurements with microscopic four point probe). Considering its outstanding features, our high aspect ratio carbon MEMS electrode will be excellent for electrochemical biosensing.},
  author       = {Amato, L. and Hansen, R.J. and Heiskanen, A. and Gammelgard, L. and Rindzevicius, T. and Martinez-Duarte, R. and Bisht, G.S. and Baronian, K. and Downard, A. and Tenje, Maria and Madou, M. and Boisen, A. and Emnéus, Jenny and Keller, S.S.},
  language     = {eng},
  title        = {Dense high aspect ratio pillar arrays for carbon MEMS devices},
  year         = {2012},
}