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Dry release of suspended nanostructures

Forsén, E; Davis, Z J; Dong, M; Nilsson, S G; Montelius, Lars LU and Boisen, A (2004) Micro Nano Engin, 2003 In Microelectr Engin 73-74, 487-490 (2004)
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author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
in
Microelectr Engin 73-74, 487-490 (2004)
conference name
Micro Nano Engin, 2003
external identifiers
  • Scopus:2542429756
language
English
LU publication?
yes
id
3fa0b0d1-bbf1-489c-a662-e2f6715627c1 (old id 962298)
date added to LUP
2008-01-28 17:10:38
date last changed
2016-10-13 04:57:13
@misc{3fa0b0d1-bbf1-489c-a662-e2f6715627c1,
  author       = {Forsén, E and Davis, Z J and Dong, M and Nilsson, S G and Montelius, Lars and Boisen, A},
  language     = {eng},
  series       = {Microelectr Engin 73-74, 487-490 (2004)},
  title        = {Dry release of suspended nanostructures},
  year         = {2004},
}