Pulsed laser deposited transparent and conductive V-doped ZnO thin films
(2020) In Thin Solid Films 700.- Abstract
ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm2. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads... (More)
ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm2. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads to an increase of the c-axis lattice parameter. The films are transparent within the wavelength range 400–1200 nm. The electrical resistivity of the films drops from 8.2 10−3 to 1.3 10−3 Ω cm with an increase in the dopant concentration up to 0.9 at. % and then rises as the dopant level is increased further.
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- author
- Smaali, A. ; Abdelli-Messaci, S. ; Lafane, S. ; Mavlonov, A. ; Lenzner, J. ; Richter, S. LU ; Kechouane, M. ; Nemraoui, O. and Ellmer, K.
- publishing date
- 2020-04-30
- type
- Contribution to journal
- publication status
- published
- keywords
- Electrical properties, Optical properties, Pulsed laser deposition, Thin films, Transparent conducting oxides, Vanadium-doped zinc oxide
- in
- Thin Solid Films
- volume
- 700
- article number
- 137892
- publisher
- Elsevier
- external identifiers
-
- scopus:85081133986
- ISSN
- 0040-6090
- DOI
- 10.1016/j.tsf.2020.137892
- language
- English
- LU publication?
- no
- additional info
- Publisher Copyright: © 2020 Elsevier B.V.
- id
- 19c63de1-d50c-415f-9478-346ed8efa84a
- date added to LUP
- 2022-04-19 14:43:38
- date last changed
- 2022-04-29 11:27:05
@article{19c63de1-d50c-415f-9478-346ed8efa84a, abstract = {{<p>ZnO and vanadium-doped ZnO (0.7–4.1 at.%) thin films were deposited onto corning glass substrates by the pulsed laser deposition technique using a KrF excimer laser (λ = 248 nm). The films were deposited at 500 °C under an oxygen pressure of 1 Pa with a laser fluence of 2 J/cm<sup>2</sup>. The structural, morphological, optical and electrical properties as a function of the dopant atomic concentration were investigated by means of X-ray diffraction, Scanning Electron Microscopy, spectrophotometry, conductivity and Hall measurements. All the doped and undoped films show a preferential orientation along the c-axis with a deterioration at higher doping levels (>4 at. %). Besides, as the doping amount increases the in-plane stress leads to an increase of the c-axis lattice parameter. The films are transparent within the wavelength range 400–1200 nm. The electrical resistivity of the films drops from 8.2 10<sup>−3</sup> to 1.3 10<sup>−3</sup> Ω cm with an increase in the dopant concentration up to 0.9 at. % and then rises as the dopant level is increased further.</p>}}, author = {{Smaali, A. and Abdelli-Messaci, S. and Lafane, S. and Mavlonov, A. and Lenzner, J. and Richter, S. and Kechouane, M. and Nemraoui, O. and Ellmer, K.}}, issn = {{0040-6090}}, keywords = {{Electrical properties; Optical properties; Pulsed laser deposition; Thin films; Transparent conducting oxides; Vanadium-doped zinc oxide}}, language = {{eng}}, month = {{04}}, publisher = {{Elsevier}}, series = {{Thin Solid Films}}, title = {{Pulsed laser deposited transparent and conductive V-doped ZnO thin films}}, url = {{http://dx.doi.org/10.1016/j.tsf.2020.137892}}, doi = {{10.1016/j.tsf.2020.137892}}, volume = {{700}}, year = {{2020}}, }