Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching
Romano, L. ; Kagias, M. LU
; Jefimovs, K.
and Stampanoni, M.
(2016)
In RSC Advances
6(19).
p.16025-16029
- Abstract
Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/209f8967-4a55-496c-bac7-ecfc3870fb52
- author
- Romano, L.
; Kagias, M.
LU
; Jefimovs, K.
and Stampanoni, M.
- publishing date
- 2016
- type
- Contribution to journal
- publication status
- published
- subject
- in
- RSC Advances
- volume
- 6
- issue
- 19
- pages
- 5 pages
- publisher
- Royal Society of Chemistry
- external identifiers
-
- scopus:84958259272
- ISSN
- 2046-2069
- DOI
- 10.1039/c5ra24947c
- language
- English
- LU publication?
- no
- additional info
- Publisher Copyright: © 2016 The Royal Society of Chemistry.
- id
- 209f8967-4a55-496c-bac7-ecfc3870fb52
- date added to LUP
- 2023-11-27 09:10:51
- date last changed
- 2024-06-05 16:17:01
@article{209f8967-4a55-496c-bac7-ecfc3870fb52,
abstract = {{<p>Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.</p>}},
author = {{Romano, L. and Kagias, M. and Jefimovs, K. and Stampanoni, M.}},
issn = {{2046-2069}},
language = {{eng}},
number = {{19}},
pages = {{16025--16029}},
publisher = {{Royal Society of Chemistry}},
series = {{RSC Advances}},
title = {{Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching}},
url = {{http://dx.doi.org/10.1039/c5ra24947c}},
doi = {{10.1039/c5ra24947c}},
volume = {{6}},
year = {{2016}},
}