Characterization of micromachined ultrasonic transducers using light diffraction tomography
(2005) In IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52(12). p.2298-2302- Abstract
- This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high... (More)
- This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz waterloaded transducer were successfully characterized with light diffraction tomography. (Less)
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/210231
- author
- Almqvist, Monica LU ; Törndahl, Marcus LU ; Nilsson, M and Lilliehorn, T
- organization
- publishing date
- 2005
- type
- Contribution to journal
- publication status
- published
- subject
- in
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- volume
- 52
- issue
- 12
- pages
- 2298 - 2302
- publisher
- IEEE - Institute of Electrical and Electronics Engineers Inc.
- external identifiers
-
- pmid:16463495
- wos:000234398700014
- scopus:33644857664
- ISSN
- 0885-3010
- DOI
- 10.1109/TUFFC.2005.1563272
- language
- English
- LU publication?
- yes
- id
- 087387ce-1ecb-471c-9981-82fc9014d3bb (old id 210231)
- alternative location
- http://ieeexplore.ieee.org/iel5/58/33178/01563272.pdf
- date added to LUP
- 2016-04-01 12:04:27
- date last changed
- 2022-03-20 23:06:32
@article{087387ce-1ecb-471c-9981-82fc9014d3bb, abstract = {{This paper demonstrates that light diffraction tomography can be used to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail. Two types of MUTs have been characterized with the method, one air-coupled capacitive MUT (cMUT) and one waterloaded continuous wave (CW) miniature multilayer lead zirconate titanate (PZT) transducer. Light diffraction tomography is an ultrasound measurement method with some special characteristics. Based on the interaction of light and ultrasound, it combines light intensity measurements with tomography algorithms to produce a measurement system. The method offers nonperturbing pressure measurements with high spatial resolution. It has been shown that, under certain circumstances, light diffraction tomography can be used as an absolute pressure measurement method with accuracy in the order of 10% in water and 13% in air. The results show that air-coupled cMUTs in the frequency range of about 1 MHz as well as the extreme near field of a miniaturized CW 10 MHz waterloaded transducer were successfully characterized with light diffraction tomography.}}, author = {{Almqvist, Monica and Törndahl, Marcus and Nilsson, M and Lilliehorn, T}}, issn = {{0885-3010}}, language = {{eng}}, number = {{12}}, pages = {{2298--2302}}, publisher = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}}, series = {{IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control}}, title = {{Characterization of micromachined ultrasonic transducers using light diffraction tomography}}, url = {{http://dx.doi.org/10.1109/TUFFC.2005.1563272}}, doi = {{10.1109/TUFFC.2005.1563272}}, volume = {{52}}, year = {{2005}}, }