Fabrication and mechanical characterization of ultrashort nanocantilevers
(2003) In Applied Physics Letters 83(5). p.990-992- Abstract
- Three aspects on nanocantilevers are presented in this letter. First, we present the fabrication process of 2 mum long freestanding chromium cantilevers with width 150 nm, and thickness 50 nm. Second, a measurement scheme using an atomic force microscope operating in contact mode was employed to study the mechanical properties along the length of the cantilevers. Third, we have investigated extremely large deflections on these nanoscale cantilevers demonstrating their high ductility. The spring constants calculated from the experimental data are smaller than expected from classical mechanics calculations, but show good agreement with previously reported calculations for largely deflected beams. (C) 2003 American Institute of Physics.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/305124
- author
- Ghatnekar-Nilsson, Sara LU ; Sarwe, Eva-Lena LU and Montelius, Lars LU
- organization
- publishing date
- 2003
- type
- Contribution to journal
- publication status
- published
- subject
- in
- Applied Physics Letters
- volume
- 83
- issue
- 5
- pages
- 990 - 992
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- wos:000184474000060
- scopus:0041876448
- ISSN
- 0003-6951
- DOI
- 10.1063/1.1592303
- language
- English
- LU publication?
- yes
- id
- 0a885db7-a9a1-4c87-b387-3c1dd5b21082 (old id 305124)
- date added to LUP
- 2016-04-01 12:29:41
- date last changed
- 2022-04-21 08:10:44
@article{0a885db7-a9a1-4c87-b387-3c1dd5b21082,
abstract = {{Three aspects on nanocantilevers are presented in this letter. First, we present the fabrication process of 2 mum long freestanding chromium cantilevers with width 150 nm, and thickness 50 nm. Second, a measurement scheme using an atomic force microscope operating in contact mode was employed to study the mechanical properties along the length of the cantilevers. Third, we have investigated extremely large deflections on these nanoscale cantilevers demonstrating their high ductility. The spring constants calculated from the experimental data are smaller than expected from classical mechanics calculations, but show good agreement with previously reported calculations for largely deflected beams. (C) 2003 American Institute of Physics.}},
author = {{Ghatnekar-Nilsson, Sara and Sarwe, Eva-Lena and Montelius, Lars}},
issn = {{0003-6951}},
language = {{eng}},
number = {{5}},
pages = {{990--992}},
publisher = {{American Institute of Physics (AIP)}},
series = {{Applied Physics Letters}},
title = {{Fabrication and mechanical characterization of ultrashort nanocantilevers}},
url = {{http://dx.doi.org/10.1063/1.1592303}},
doi = {{10.1063/1.1592303}},
volume = {{83}},
year = {{2003}},
}