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Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N

Shypylenko, A. ; Pshyk, A. V. ; Medjanik, K. LU ; Peplinska, B. ; Oyoshid, K. ; Jurga, S. and Coya, E. (2016) 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
Abstract

Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 1017 ions/cm2 and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.

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author
; ; ; ; ; and
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
CAVD, coatings, hardness, ion implantation, NEXAFS, TiSiN, young modulus
host publication
Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016
article number
7757251
publisher
IEEE - Institute of Electrical and Electronics Engineers Inc.
conference name
6th International Conference Nanomaterials: Applications and Properties, NAP 2016
conference location
Lviv, Ukraine
conference dates
2016-09-14 - 2016-09-19
external identifiers
  • scopus:85007044588
ISBN
9781509025138
DOI
10.1109/NAP.2016.7757251
language
English
LU publication?
yes
id
af67dab9-aa2b-4de5-9220-6b47bfc2bd05
date added to LUP
2017-01-23 12:37:14
date last changed
2022-07-06 15:22:49
@inproceedings{af67dab9-aa2b-4de5-9220-6b47bfc2bd05,
  abstract     = {{<p>Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 × 10<sup>17</sup> ions/cm<sup>2</sup> and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.</p>}},
  author       = {{Shypylenko, A. and Pshyk, A. V. and Medjanik, K. and Peplinska, B. and Oyoshid, K. and Jurga, S. and Coya, E.}},
  booktitle    = {{Proceedings of the 6th International Conference Nanomaterials: Applications and Properties, NAP 2016}},
  isbn         = {{9781509025138}},
  keywords     = {{CAVD; coatings; hardness; ion implantation; NEXAFS; TiSiN; young modulus}},
  language     = {{eng}},
  month        = {{11}},
  publisher    = {{IEEE - Institute of Electrical and Electronics Engineers Inc.}},
  title        = {{Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N}},
  url          = {{http://dx.doi.org/10.1109/NAP.2016.7757251}},
  doi          = {{10.1109/NAP.2016.7757251}},
  year         = {{2016}},
}