Fabrication of 10 nm enclosed nanofluidic channels
(2002) In Applied Physics Letters 81(1). p.174-176- Abstract
We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/e173bc6d-0b19-49fd-8bac-3499684d7b03
- author
- Cao, Han ; Yu, Zhaoning ; Wang, Jian LU ; Tegenfeldt, Jonas O. LU ; Austin, Robert H. ; Chen, Erli ; Wu, Wei and Chou, Stephen Y.
- organization
- publishing date
- 2002-07-01
- type
- Contribution to journal
- publication status
- published
- in
- Applied Physics Letters
- volume
- 81
- issue
- 1
- pages
- 3 pages
- publisher
- American Institute of Physics (AIP)
- external identifiers
-
- scopus:79958221815
- ISSN
- 0003-6951
- DOI
- 10.1063/1.1489102
- language
- English
- LU publication?
- yes
- id
- e173bc6d-0b19-49fd-8bac-3499684d7b03
- date added to LUP
- 2018-10-20 10:40:51
- date last changed
- 2022-01-31 06:19:36
@article{e173bc6d-0b19-49fd-8bac-3499684d7b03, abstract = {{<p>We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The nanofluidic channels were further narrowed and sealed by techniques that are based on nonuniform deposition. The resulting sealed channels have a cross section as small as 10 nm by 50 nm, of great importance for confining biological molecules into ultrasmall spaces. These techniques can be valuable fabrication tools for Nanoelectromechanical Systems and Micro/Nano Total Analysis Systems.</p>}}, author = {{Cao, Han and Yu, Zhaoning and Wang, Jian and Tegenfeldt, Jonas O. and Austin, Robert H. and Chen, Erli and Wu, Wei and Chou, Stephen Y.}}, issn = {{0003-6951}}, language = {{eng}}, month = {{07}}, number = {{1}}, pages = {{174--176}}, publisher = {{American Institute of Physics (AIP)}}, series = {{Applied Physics Letters}}, title = {{Fabrication of 10 nm enclosed nanofluidic channels}}, url = {{http://dx.doi.org/10.1063/1.1489102}}, doi = {{10.1063/1.1489102}}, volume = {{81}}, year = {{2002}}, }