A compact CMOS MEMS microphone with 66dB SNR
(2009) IEEE International Solid-State Circuits Conference (ISSCC), 2009 52. p.350-351- Abstract
- A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.
Please use this url to cite or link to this publication:
https://lup.lub.lu.se/record/1300085
- author
- Citakovic, Jelena ; Høvesten, Per F. ; Rocca, Gino ; van Halteren, Aart ; Rombach, Pirmin ; Stenberg, Lars J. ; Andreani, Pietro LU and Bruun, Erik
- organization
- publishing date
- 2009
- type
- Chapter in Book/Report/Conference proceeding
- publication status
- published
- subject
- keywords
- integrated, microphone, CMOS, MEMS
- host publication
- [Host publication title missing]
- volume
- 52
- pages
- 2 pages
- conference name
- IEEE International Solid-State Circuits Conference (ISSCC), 2009
- conference location
- San Francisco, United States
- conference dates
- 2009-02-08 - 2009-02-12
- external identifiers
-
- scopus:70349279078
- ISSN
- 0193-6530
- DOI
- 10.1109/ISSCC.2009.4977452
- language
- English
- LU publication?
- yes
- id
- daeaf06d-5b47-48d1-967f-cf7d087f5e29 (old id 1300085)
- date added to LUP
- 2016-04-04 09:19:53
- date last changed
- 2022-04-08 02:32:00
@inproceedings{daeaf06d-5b47-48d1-967f-cf7d087f5e29, abstract = {{A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.}}, author = {{Citakovic, Jelena and Høvesten, Per F. and Rocca, Gino and van Halteren, Aart and Rombach, Pirmin and Stenberg, Lars J. and Andreani, Pietro and Bruun, Erik}}, booktitle = {{[Host publication title missing]}}, issn = {{0193-6530}}, keywords = {{integrated; microphone; CMOS; MEMS}}, language = {{eng}}, pages = {{350--351}}, title = {{A compact CMOS MEMS microphone with 66dB SNR}}, url = {{http://dx.doi.org/10.1109/ISSCC.2009.4977452}}, doi = {{10.1109/ISSCC.2009.4977452}}, volume = {{52}}, year = {{2009}}, }