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A compact CMOS MEMS microphone with 66dB SNR

Citakovic, Jelena; Høvesten, Per F.; Rocca, Gino; van Halteren, Aart; Rombach, Pirmin; Stenberg, Lars J.; Andreani, Pietro LU and Bruun, Erik (2009) IEEE International Solid-State Circuits Conference (ISSCC), 2009 In [Host publication title missing] 52. p.350-351
Abstract
A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.
Please use this url to cite or link to this publication:
author
organization
publishing date
type
Chapter in Book/Report/Conference proceeding
publication status
published
subject
keywords
integrated, microphone, CMOS, MEMS
in
[Host publication title missing]
volume
52
pages
2 pages
conference name
IEEE International Solid-State Circuits Conference (ISSCC), 2009
external identifiers
  • Scopus:70349279078
ISSN
0193-6530
DOI
10.1109/ISSCC.2009.4977452
language
English
LU publication?
yes
id
daeaf06d-5b47-48d1-967f-cf7d087f5e29 (old id 1300085)
date added to LUP
2009-02-19 13:08:40
date last changed
2017-01-01 07:46:55
@inproceedings{daeaf06d-5b47-48d1-967f-cf7d087f5e29,
  abstract     = {A microphone system, comprising two differentially-operated MEMS microphones and a CMOS differential amplifier mounted on a common die substrate, has a very small volume of 2.6x3.2x0.865mm3, showing a record-high SNR of 66dB over the 20Hz-20kHz audio band. The system sensitivity is -33.5dB (Vrms/Pa), PSRR is above 55dB, and THD is below 1% for sound pressure levels below 112dB. The current consumption is 120μA from a 1.8V power supply.},
  author       = {Citakovic, Jelena and Høvesten, Per F. and Rocca, Gino and van Halteren, Aart and Rombach, Pirmin and Stenberg, Lars J. and Andreani, Pietro and Bruun, Erik},
  booktitle    = {[Host publication title missing]},
  issn         = {0193-6530},
  keyword      = {integrated,microphone,CMOS,MEMS},
  language     = {eng},
  pages        = {350--351},
  title        = {A compact CMOS MEMS microphone with 66dB SNR},
  url          = {http://dx.doi.org/10.1109/ISSCC.2009.4977452},
  volume       = {52},
  year         = {2009},
}